Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA
Author(s)
Bibliographic Information
Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA
（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5379）
SPIE, c2004
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Design and process integration for microelectronic manufacturing III
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Note
2004 conference is the third conference in the series
Includes bibliographical references and index
Description and Table of Contents
Description
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
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