High Purity Silicon 11

著者

• Simoen, E.
• Claeys, Cor L.
• Falster, R.
• Mazure, C.
• Stallhofer, P.
• Electrochemical Society. Meeting

書誌事項

High Purity Silicon 11

editors, E. Simoen ... [et al.]

（ECS transactions, vol.33, no.11）

Electrochemical Society, c2010

タイトル別名

High Purity Silicon 11 : dielectric and semiconductor materials, devices, and processing

注記

Includes bibliographical references and index

"The paperes included in this issue of ECS Transactions were originally presented in the symposium "High Purity Silicon 11", held during the 218th meeting of The Electrochemical Society, in Las Vegas, Nevada from October 10 to 15, 2010."-- preface

詳細情報

• NII書誌ID(NCID): BB09048222
• ISBN:
  • 9781607681809
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: vii, 250 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA78566502