Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas

著者

• Bailey, Wayne E.
• Motamedi, M. Edward
• Luo, Fang-Chen
• Semiconductor Equipment and Materials International
• United States. National Institute of Standards and Technology
• Society of Photo-optical Instrumentation Engineers

書誌事項

Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas

Wayne Bailey, M. Edward Motamedi, Fang-Chen Luo, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2641）

SPIE, c1995

注記

Includes bibliographic references and index

詳細情報

• NII書誌ID(NCID): BC06604906
• ISBN:
  • 0819420077
• LCCN: 95070376
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: v, 154 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC21 : 621.381
• 件名:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronics -- Congresses
• 親書誌ID:
  • BA0022700X