Microelectronic structures and MEMS for optical processing III : 29-30 September, 1997, Austin, Texas

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書誌事項

Microelectronic structures and MEMS for optical processing III : 29-30 September, 1997, Austin, Texas

M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3226）

SPIE, c1997

タイトル別名

Microelectronic structures and MEMS for optical processing 3

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注記

Includes bibliographic references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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