Miniaturized systems with micro-optics and micromechanics III : 26-27 January 1998, San Jose, California

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Miniaturized systems with micro-optics and micromechanics III : 26-27 January 1998, San Jose, California

M. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3276）

SPIE, c1998

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Miniaturized systems with micro optics and micromechanics 3

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Includes bibliographical references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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