Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California

著者

書誌事項

Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California

M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3513）

SPIE, c1998

タイトル別名

Microelectronic structures and MEMS for optical processing 4

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

A volume of papers on microelectronic structures and MEMS for optical processing. It explores: micromirrors; micro-optical components and microsensors; optomechanical switches; and modulators and microactuators.

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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