Miniaturized systems with micro-optics and MEMS : 20-22 September 1999, Santa Clara, California

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書誌事項

Miniaturized systems with micro-optics and MEMS : 20-22 September 1999, Santa Clara, California

M.E. Motamedi, Rolf Goering, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3878）

SPIE, c1999

タイトル別名

Miniaturized systems with micro-optics and micromechanics

Miniaturized systems with micro optics and MEMS

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注記

Earlier conferences titled: Miniaturized systems with micro-optics and micromechanics

Includes bibliographical references and index

内容説明・目次

内容説明

These scientific papers discuss miniaturized systems with micro-optics and microelectromechanical systems (MEMS) from a range of perspectives.

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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