MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003, San Jose, California, USA

Author(s)

• Janson, Siegfried W.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

Bibliographic Information

MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003, San Jose, California, USA

Siegfried W. Janson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4981）

SPIE, c2003

Other Title

MEMS components and applications for industry, automobiles, aerospace, and communication 2

Note

Includes bibliographical references and index

Details

• NCID: BC16158975
• ISBN:
  • 0819447811
• LCCN: 2003544705
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: xliv, 248 p.
• Size: 28 cm
• Classification:
  • LCC : TK7875
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Design and construction -- Congresses
  • LCSH : Microelectromechanical systems -- Industrial applications -- Congresses
  • LCSH : Manufacturing processes -- Congresses
• Parent Bibliography ID:
  • BA0022700X