Micromachining and microfabrication process technology X : 25-27 January 2005, San Jose, California, USA

Author(s)

• Perez-Maher, Mary Ann
• Stewart, Harold D.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

Bibliographic Information

Micromachining and microfabrication process technology X : 25-27 January 2005, San Jose, California, USA

Mary Ann Maher, Harold D. Stewart, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5715）

SPIE, c2005

Other Title

Micromachining and microfabrication process technology 10

Note

Includes bibliographical references and author index

Description and Table of Contents

Description

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

by "Nielsen BookData"

Details

• NCID: BC16169279
• ISBN:
  • 0819456896
• LCCN: 2005299098
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: vii, 200 p.
• Size: 28 cm
• Classification:
  • LCC : TJ1191.5
  • DC22 : 671.3/5
• Subject Headings:
  • LCSH : Micromachining -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Electromechanical devices -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA0022700X