Yasuoka Koichi

ID:9000258127198

Toshiba Corporation, Kawasaki 210, Japan (1995年 CiNii収録論文より)

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  • 3kHz XeCl Excimer Laser Using New Type of Electrode.

    Ishii Akira , Yasuoka Koichi , Okita Yuji , Tamagawa Tohru

    A new type of electrode for XeCl excimer lasers has been developed. In order to produce a stable discharge at a high repetition rate, we calculated the electric field strength distribution of the disc …

    Japanese Journal of Applied Physics 34(5A), 2324-2328, 1995

    J-STAGE

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