Konishi Toshifumi

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  • A 0.1 G-to-20 G integrated MEMS inertial sensor

    Yamane Daisuke , Konishi Toshifumi , Matsushima Takaaki , Toshiyoshi Hiroshi , Masu Kazuya , Machida Katsuyuki

    This paper presents a novel integrated MEMS inertial sensor with a wide range of acceleration from 0.1 G to 20 G (G = 9.8 m/s<sup>2</sup>) and with a design suitable for CMOS integration. …

    Jpn. J. Appl. Phys. 54(8), 087202, 2015-07-07

    応用物理学会

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