Harada Tetsuo

ID:9000300213186

Center for EUVL, Laboratory of Advanced Science and Technology for Industry, University of Hyogo (2015年 CiNii収録論文より)

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論文一覧:  1件中 1-1 を表示

  • Effective EUV Resist Outgassing Barrier Using a Novel Top Coat Material

    Wang Xiaowei , Pawlowski Georg , Okayasu Tetsuo [他] , Suzuki Masato , Hama Yusuke , Watanabe Takeo , Harada Tetsuo , Kinoshita Hiroo

    The contamination of the EUV optics by resist fragments generated during exposure under high volume manufacturing conditions is a serious threat to the lifetime of the EUV exposure tools. The photon e …

    Journal of Photopolymer Science and Technology 28(1), 111-117, 2015

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