BABA Shigeru

ID:9000300216907

Department of Materials and Life Science, Seikei University (2015年 CiNii収録論文より)

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  • Growth of Target Race Track Profile during Magnetron Sputtering

    NAKANO Takeo , SAITOU Yudai , UEDA Mariko [他] , ITAMURA Noriaki , BABA Shigeru

      The evolution of target "race track" erosion was evaluated experimentally during the conventional DC magnetron sputtering of metal targets with different Ar gas pressure environments. At gas pressur …

    Journal of the Vacuum Society of Japan 58(7), 261-264, 2015

    J-STAGE

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