Suga Osamu

ID:9000303148582

EUVL Infrastructure Development Center, Inc., Tsukuba, Ibaraki 305-8569, Japan. (2015年 CiNii収録論文より)

同姓同名の著者を検索

論文一覧:  1件中 1-1 を表示

  • Atomic step patterning on quartz glass via thermal nanoimprinting

    Suga Osamu , Yoshimoto Mamoru , Okuyama Chieko , Matsuda Akifumi , Hiroshima Hiroshi , Takahashi Masaharu

    A new surface smoothing method using thermal nanoimprinting technology with a 0.2-nm-high atomically stepped sapphire mold has been investigated for quartz glass with a glass transition temperature (T …

    Jpn. J. Appl. Phys. 54(9), 098001, 2015-08-05

    応用物理学会

ページトップへ