CiNii Books Author - IEEE Workshop on Micro Electro Mechanical Systems

1

Proceedings, IEEE the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and systems : Heidelberg, Germany, January 25-29, 1998

sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Ministry of Economic Affairs of Baden-Württemberg

IEEE Service Center c1998

: soft , : case , : micro

Available at 7 libraries
2

Proceedings, IEEE the Tenth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and robots : Nagoya, Japan, January 26-30, 1997

sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center

IEEE Service Center c1997

: soft , : case , : micro

Available at 5 libraries
3

Proceedings, the Ninth Annual International Workshop on IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : San Diego, California, USA, February 11-15, 1996

sponsored by the IEEE Robotics and Automation Society

IEEE Service Center c1996

: soft , : case , : micro

Available at 7 libraries
4

Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Amsterdam, Netherlands, January 29, February 2, 1995

sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division

IEEE Service Center c1995

: soft. , : case. , : micro.

Available at 6 libraries
5

Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Oiso, Japan, January 25-28, 1994

sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center

IEEE Service Center c1994

: soft. , : case. , : micro.

Available at 6 libraries
6

Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Fort Lauderdale, Florida, February 7-10, 1993

sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division

IEEE Service Center c1993

: soft. , : case. , : micro.

Available at 7 libraries
7

Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Travemünde, Germany, 4 February - 7 February 1992

sponsored by the IEEE Robotics and Automation Society, and in cooperation with the German IEEE Section ; W. Benecke, H.-C. Petzold (eds.)

IEEE 1992

: soft. , : case. , : micro.

Available at 12 libraries
8

Proceedings, IEEE micro electro mechanical systems : an investigation of micro structures,sensors, actuators, machines, and robots : Nara, Japan, 30 January-2 February 1991

sponsored by the IEEE Robotics and Automation Society, and incooperation with the IEE of Japan and the ASME Dynamic Systems and Control Division

IEEE c1991

Available at 8 libraries
9

Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings

IEEE

IEEE c1990

Available at 6 libraries
10

Proceedings : 2nd IEEE Workshop on Micro Electro Mechanical Systems(MEMS), Salt Lake City, Utah, February 20-22, 1989

sponsored by the IEEE Robotics and Automation Council

IEEE c1989

Available at 1 libraries

IEEE Workshop on Micro Electro Mechanical Systems

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