ID:DA08374671
Advanced Research Workshop on "Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies", NATO
Workshop on "Nanolithography: a Borderland Between STM, EB, IB,and X-Ray Lithographies", NATO Advanced Research
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edited by M. Gentili, C. Giovannella, and S. Selci
Kluwer Academic Publishers 1994 NATO ASI series ser. E . Applied sciences ; v. 264
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