American Vacuum Society. Electronic Materials and Process Division

ID:DA08745048

別名: American Vacuum Society. Electronic Materials and Processing Division

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Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California

chairmen/editors: Devendra K. Sadana, Carl M. Lampert ; cooperating organizations: American Vacuum Society, Electronic Materials and Process Division

S.P.I.E.-- International Society for Optical Engineering c1984 Proceedings / SPIE -- the International Society for Optical Engineering v. 463

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