Anatoly M. Filachev, chair/editor ; Inna S. Gaidoukova, coeditor ; organized by RD&P Center ORION/State Scientific Center, Russian Federation [and] State Research Institute of Electron and Ion Optics (Russia) ; sponsored by Ministry of Industry, Science and Technologies of Russian Federation, Russian Academy of Sciences, [and] SPIE Russia Chapter
SPIE
c2003
Proceedings / SPIE -- the International Society for Optical Engineering
v. 5025
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