検索結果144件中 1-20 を表示

  • OKAZAKI Shinji ID: 9000000412140

    Taiho Pharmaceutical Co., Ltd., Research Center (2000年 CiNii収録論文より)

    CiNii収録論文: 1件

    • Design and Synthesis of Sensitive Fluorogenic Substrates Specific for Lys-Gingipain^1 (2000)
  • OKAZAKI Shinji ID: 9000001720005

    Semiconductor Development Center Semiconductor & Integrated Circuits Div. Hitachi Ltd. (1996年 CiNii収録論文より)

    CiNii収録論文: 1件

    • Lithographic Technologies for 1-Gb DRAMs and Beyond (1996)
  • OKAZAKI Shinji ID: 9000004870827

    ASET EUVL Laboratory (2002年 CiNii収録論文より)

    CiNii収録論文: 18件

    • Optical Performance of KrF Excimer Laser Lithography with Phase Shift Mask for Fabrication of 0.15 μm and Below (1995)
    • Estimation of Extreme Ultraviolet Power and Throughput for Extreme Ultraviolet Lithography (2001)
    • Phase-Shifting Technology for ULSI Patterning (Special Issue on Opto-Electronics and LSI) (1993)
  • OKAZAKI Shinji ID: 9000005623864

    Central Reseatch Laboratory, HITACHI ltd. (1989年 CiNii収録論文より)

    CiNii収録論文: 1件

    • Analysis of Chemical Amplification Resist Systems Using a Kinetic Model and Numerical Simulation : Resist Material and Process : (1989)
  • OKAZAKI Shinji ID: 9000005624016

    Central Research Laboratory, Hitachi, Ltd (1989年 CiNii収録論文より)

    CiNii収録論文: 1件

    • Fabrication of Deep Sub-μm Narrow-Channel Si-MOSFET's with Twofold-Gate Structures : Microfabrication and Physics : (1989)
  • OKAZAKI Shinji ID: 9000005624075

    Central Research Laboratory, Hitachi Ltd (1991年 CiNii収録論文より)

    CiNii収録論文: 1件

    • EB call projection Lithography : Lithography Technology : (1991)
  • OKAZAKI Shinji ID: 9000005624435

    Central Research Lab., Hitachi Ltd. (1992年 CiNii収録論文より)

    CiNii収録論文: 1件

    • Effect of EB Acceleration Voltage and Beam Sharpness on Process Latitude of 0.2μm Lines : Electron Beam Lithography : (1992)
  • OKAZAKI Shinji ID: 9000005624674

    Central Research Laboratory, Hitachi Ltd. (1992年 CiNii収録論文より)

    CiNii収録論文: 1件

    • A Novel Probe Size Measurement Method for a Fine Electron Beam : Inspection and Testing : (1992)
  • OKAZAKI Shinji ID: 9000005733981

    Central Research Laboratory, Hitachi, Ltd.:(Present address)Semiconductor & Integrated Circuits Division, Hitachi, Ltd. (1995年 CiNii収録論文より)

    CiNii収録論文: 1件

    • Suppression of Acid Diffusion in Chemical Amplification Resists by Molecular Control of Base Matrix Polymers (1995)
  • OKAZAKI Shinji ID: 9000005752241

    Central Research Laboratory, Hitachi Ltd. (1980年 CiNii収録論文より)

    CiNii収録論文: 1件

    • Electron Beam Mask Fabrication for MOSLSI's with 1.5 μm Design Rule : A-1: ADVANCED LITHOGRAPHY AND PROCESS (1980)
  • OKAZAKI Shinji ID: 9000006462858

    Association of Super-Advanced Electonics Technologies (2002年 CiNii収録論文より)

    CiNii収録論文: 1件

    • Fine Pattern Replication Using ETS-1 Three-Aspherical Mirror Imaging System (2002)
  • OKAZAKI Shinji ID: 9000018530299

    Gastroenterological, General, Breast and Thyroid Surgery (First Department of Surgery), Yamagata University Faculty of Medicine (2010年 CiNii収録論文より)

    CiNii収録論文: 1件

    • Spleen-preserving distal pancreatectomy with conservation of the splenic artery and vein : techniques and its significance (2010)
  • OKAZAKI Shinji ID: 9000107334538

    Atsugi Research Center, Association of Super-Advanced Electronics Technologies (2001年 CiNii収録論文より)

    CiNii収録論文: 1件

    • Simulation of Multilayer Defects in Extreme Ultraviolet Masks (2001)
  • Okazaki Shinji ID: 9000252764085

    Hitachi Limited, Central Research Laboratory (1991年 CiNii収録論文より)

    CiNii収録論文: 1件

    • A Novel Optical Lithography Technique Using the Phase-Shifter Fringe (1991)
  • Okazaki Shinji ID: 9000252776246

    Central Research Laboratory, Hitachi Ltd. (1999年 CiNii収録論文より)

    CiNii収録論文: 1件

    • Theoretical Estimation of Absorption Coefficients of Various Polymers at 13nm (1999)
  • Okazaki Shinji ID: 9000252776608

    EUV Lithography Laboratory, Association of Super-Advanced Electronics Technologies (2001年 CiNii収録論文より)

    CiNii収録論文: 1件

    • Evaluation of the Outgassing from Resists at the EUV Wavelength. (2001)
  • Okazaki Shinji ID: 9000252952357

    Central Research Laboratory, Hitachi, Ltd. (1982年 CiNii収録論文より)

    CiNii収録論文: 1件

    • Electron Beam Enhanced Surface Photovoltage (1982)
  • Okazaki Shinji ID: 9000252968081

    Central Research Laboratory, HITACHI Ltd. (1989年 CiNii収録論文より)

    CiNii収録論文: 1件

    • Analysis of Chemical Amplification Resist Systems Using a Kinetic Model and Numerical Simulation (1989)
  • Okazaki Shinji ID: 9000252968115

    Central Research Laboratory, Hitachi Ltd. (1989年 CiNii収録論文より)

    CiNii収録論文: 1件

    • Fabrication of Deep Sub-μm Narrow-Channe1 Si-MOSFET's with Twofold-Gate Structures (1989)
  • Okazaki Shinji ID: 9000252972197

    CiNii収録論文: 1件

    • Novel Process for Direct Delineation of Spin on Glass (SOG) (1990)
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