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  • 佐布 晃昭 ID: 9000326641251

    Articles in CiNii:8

    • An Evaluation on Adhesion Characteristics with Metal Layer Structure of MEMS Accelerometer (2015)
    • A Multi-layer Metal MEMS Inertial Sensor for Sub-1mG Detection (2016)
    • A Multi-layer Metal MEMS Accelerometer with Differential Sensing Structure (2016)
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