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  • 北川 剛弘 ID: 9000017365356

    Articles in CiNii:5

    • Estimation of measurement uncertainty for the CMM by Simplified Checking Gage (1st report) (2010)
    • Evaluation of the geometry shape measurement accuracy by CMM (2011)
    • Measurement uncertainty evaluation by signal-to-noise ratio method using CMM (2011)
  • KITAGAWA Takahiro ID: 9000003796581

    浜松工業技術センター (2000 from CiNii)

    Articles in CiNii:3

    • シリコンウエハ用超精密平面研削盤の開発 : 超低速切込みによる延性モード加工 (2000)
    • シリコンウエハ用超精密平面研削盤の開発 : 延性モード加工用の超精密切込み装置 (2000)
    • Development of Ultraprecision Surface Grinder for Ductile Mode Using Fine and Coarse Positioning (2000)
  • Kitagawa Takahiro ID: 9000283813731

    Hamamatsu Industrial Research Institute of Shizuoka Prefecture (2007 from CiNii)

    Articles in CiNii:1

    • High-Speedy Nanometer Positioning Device by the Combination of New Type Linear Motor (Called Tunnel Actuator) and Linear Ball Guideway. (2007)
  • Kitagawa Takehiro ID: 9000283821514

    浜松工業技術支援センター 機械科 (2011 from CiNii)

    Articles in CiNii:1

    • Thermal displacement drift decrease of precision positioning device whose motor is cooled by Peltier module (2011)
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