Search Results1-20 of  94

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  • 大参 宏昌 ID: 9000238871881

    Articles in CiNii:1

    • 大気圧プラズマ化学輸送法による太陽電池用シリコン膜の作製 (2010)
  • 大参 宏昌 ID: 9000258635900

    大阪大学 大学院工学研究科精密科学専攻 (2003 from CiNii)

    Articles in CiNii:1

    • Deposition of Silicon Nitride Film by Atmospheric Pressure Plasma CVD-Effect of H2- (2003)
  • 大参 宏昌 ID: 9000258637236

    大阪大学 大学院工学研究科 (2004 from CiNii)

    Articles in CiNii:1

    • Hige-Rate Deposition of SiNx films by Atmospheric Pressure Plasma CVD -Optical Emission Spectroscopy of the Deposition Plasma (II)- (2004)
  • 大参 宏昌 ID: 9000258639632

    大阪大学 大学院工学研究科 精密科学専攻 (2004 from CiNii)

    Articles in CiNii:1

    • High-rate Deposition of SiNx Films by Atmospheric Pressure Plasma CVD -Optical Emission Spectroscopy of the Deposition Plasma- (2004)
  • OHMI Hiromasa ID: 9000107384309

    Articles in CiNii:1

    • Formation of Polycrystalline Si Thin Films Using Nanocrystalline Ge Nuclei (2008)
  • OHMI Hiromasa ID: 9000278211073

    Articles in CiNii:32

    • レーザー冷却法による中性原子ビームのコリメーション (1997)
    • 中性原子ビームのコリメーションとナノリソグラフィーへの応用 (1998)
    • レーザー冷却法を用いた異方性ドライエッチングプロセスの開発 (1998)
  • Ohmi Hiromasa ID: 9000258635906

    Osaka University (2003 from CiNii)

    Articles in CiNii:1

    • Epitaxial Growth of Si by Atmospheric Pressure Plasma CVD (IV) (2003)
  • Ohmi Hiromasa ID: 9000258637240

    Osaka University (2004 from CiNii)

    Articles in CiNii:1

    • Preparation of polycrystalline silicon films by atmospheric pressure plasma CVD (2004)
  • Ohmi Hiromasa ID: 9000258641267

    Osaka University (2005 from CiNii)

    Articles in CiNii:1

    • High-Rate Synthesis of Diamond by Atmospheric Pressure Plasma Chemical Vapor Deposition (2005)
  • Ohmi Hiromasa ID: 9000258641274

    Osaka University (2005 from CiNii)

    Articles in CiNii:1

    • Growth of Epitaxial Si films by Atmospheric Pressure Plasma CVD (2005)
  • Ohmi Hiromasa ID: 9000258645287

    Osaka University (2005 from CiNii)

    Articles in CiNii:1

    • Ultrahigh-Rate Deposition of Amorphous Silicon Films by Atmospheric Pressure Plasma Chemical Vapor Deposition (2005)
  • Ohmi Hiromasa ID: 9000258645295

    Osaka University (2005 from CiNii)

    Articles in CiNii:1

    • Growth of Si thin film on SiO<sub>2</sub> substrate with Ge islands (2005)
  • Ohmi Hiromasa ID: 9000258645307

    Osaka University (2005 from CiNii)

    Articles in CiNii:1

    • Modification of substrate surface by Ge island formation for growth of large-grained poly-Si thin film (2005)
  • Ohmi Hiromasa ID: 9000258646689

    Osaka University (2006 from CiNii)

    Articles in CiNii:1

    • Characterization of high-rate deposited micrycrystalline silicon films prepared by atmospheric pressure plasma CVD (2006)
  • Ohmi Hiromasa ID: 9000258649318

    graduate school of Osaka university (2008 from CiNii)

    Articles in CiNii:1

    • The structure control of the poly-Si thin film by noble gas diluted atmospheric-pressure plasma enhanced chemical transport. (2008)
  • Ohmi Hiromasa ID: 9000258649323

    Osaka University (2008 from CiNii)

    Articles in CiNii:1

    • Low-temperature and high-rate growth of silicon nitride using atmospheric-pressure very high-frequency plasma (2008)
  • Ohmi Hiromasa ID: 9000258649327

    Osaka university (2008 from CiNii)

    Articles in CiNii:1

    • The inactivation property of <i>B.atrophaeus</i> by atmospheric pressure mist plasma sterilization (2008)
  • Ohmi Hiromasa ID: 9000258650594

    Graduate School of Engineering, Osaka University (2009 from CiNii)

    Articles in CiNii:1

    • PFCs-free dry etching method by utilizing atmospheric-pressure plasma enhanced chemical transport (2009)
  • Ohmi Hiromasa ID: 9000258650597

    大阪大学 (2009 from CiNii)

    Articles in CiNii:1

    • 大気圧プラズマ化学輸送法とその将来展望(キーノートスピーチ) (2009)
  • Ohmi Hiromasa ID: 9000258650606

    Osaka University (2009 from CiNii)

    Articles in CiNii:1

    • Low-temperature and high-rate growth of microcrystalline Si films using atmospheric-pressure VHF plasma:Study of the film growth process by flow and heat transfer analyses (2009)
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