Search Results1-4 of  4

  • Ueda Kazuaki ID: 9000258648260

    Graduate School of Osaka University (2008 from CiNii)

    Articles in CiNii:1

    • 数値制御ローカルウエットエッチングによる二重湾曲分光結晶の加工:単結晶シリコン薄板の加工 (2008)
  • Ueda Kazuaki ID: 9000258651569

    Graduate School of Engineering, Osaka University (2009 from CiNii)

    Articles in CiNii:1

    • Improvement of thickness uniformity of SOI layer by numerically controlled local wet etching (2nd report) (2009)
  • Ueda Kazuaki ID: 9000283817219

    Graduate school of engineering Osaka University (2009 from CiNii)

    Articles in CiNii:1

    • Fabrication of Johansson-type doubly curved crystal by numerically controlled local wet etching (2009)
  • Ueda Kazuaki ID: 9000283820124

    Osaka University (2010 from CiNii)

    Articles in CiNii:1

    • 数値制御プラズマCVMによるヨハンソン型Si(111)二重湾曲分光結晶のダメージフリー加工(第3報):形状創成加工後の表面粗さの低減 (2010)
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