Search Results1-20 of  28

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  • 秋山 守人 ID: 9000014852825

    Articles in CiNii:1

    • 窒化アルミニウム薄膜形成技術 (特集 機能性薄膜形成技術最前線) (1996)
  • 秋山 守人 ID: 9000024996941

    Articles in CiNii:1

    • Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films prepared by Dual Reactive Co-Sputtering (特集 センサ&センシング技術) (2012)
  • 秋山 守人 ID: 9000283829724

    産総研九セ (2008 from CiNii)

    Articles in CiNii:1

    • High speed deposition of AlN thin film by dual frequency plasma sputtering (2008)
  • 秋山 守人 ID: 9000377377498

    Articles in CiNii:1

    • ScAlN vibration energy harvester with stress compensation (2017)
  • 秋山 守人 ID: 9000403558110

    Articles in CiNii:1

    • Assessment Report of Doctoral Theses (1993)
  • AKIYAMA Morito ID: 9000000020345

    Department of Materials Science and Technology, Graduate School of Engineering Sciences, Kyushu University (1996 from CiNii)

    Articles in CiNii:3

    • Characterization and Control of Adsorbates of Nitrogen Mono-oxide on Tin Dioxide Surface (1996)
    • WO3系半導体素子におけるNOxの検知機構 (〔触媒学会〕第71回触媒討論会講演予稿) (1993)
    • Exploration of High Sensitive Semiconducting Oxides to Nitrogen Oxides (1992)
  • AKIYAMA Morito ID: 9000003633148

    Institute for Structural and Engineering Materials, National Institute of Advanced Industrial Science and Technology (2002 from CiNii)

    Articles in CiNii:9

    • 多機能をもつ高配向性窒化アルミニウム薄膜の作製 (特集 実用化が期待される産官共同の材料技術開発) (2000)
    • 解説 応力活性化Sr3Al2O6:Euからの強い可視光放出現象--応力分布の視覚化 (1999)
    • Multifunction of Aluminum Nitride Thin films Deposited on MoSi2 Substrates--Ceramic Skin (1996)
  • AKIYAMA Morito ID: 9000003641359

    Articles in CiNii:19

    • A Foil Type Flexible Pressure Sensor Using Nitelide Aluminum Thin Filrn (2002)
    • Preparation and Application of Highly Oriented Aluminum Nitride Thin Films : Ceramic Skin (2004)
    • Temperature Dependence of Piezoelectric Properties of Sputtered Aluminum Nitride on Silicon Substrate (2006)
  • AKIYAMA Morito ID: 9000017392496

    National Institute of Advanced Industrial Science and Technology (AIST) (2010 from CiNii)

    Articles in CiNii:1

    • Hybrid Laminate Piezoelectric Materials Composed of AlN Thin Films and Polyimide Films (2010)
  • AKIYAMA Morito ID: 9000020423327

    Articles in CiNii:1

    • High Pressure Response and High Temperature Durability of Aluminum Nitride Thin Films Prepared on Inconel Substrates (2006)
  • AKIYAMA Morito ID: 9000020501626

    Articles in CiNii:1

    • Wide-Band and High Temperature Piezoelectric Response of Aluminum Nitride Thin Films Prepared on Silicon Substrates (2006)
  • AKIYAMA Morito ID: 9000020586968

    Articles in CiNii:1

    • Self-Detection of Fracture in PZT and MoSi<sub>2</sub>-Mo<sub>2</sub>B<sub>5</sub> Layered Composite Ceramics (1994)
  • AKIYAMA Morito ID: 9000253648276

    Department of Materials Science and Technology, Graduate School of Engineering Sciences, Kyushu University (1993 from CiNii)

    Articles in CiNii:1

    • Promotion of NO Sensitivity of WO3 Element with the Addition of Noble Metals. (1993)
  • AKIYAMA Morito ID: 9000254285174

    National Institute of Advanced Industrial Science and Technology (2002 from CiNii)

    Articles in CiNii:1

    • A Foil Type Flexible Pressure Sensor Using Nitelide Aluminum Thin Film (2002)
  • AKIYAMA Morito ID: 9000283624108

    Measurement Solution Research, AIST (2012 from CiNii)

    Articles in CiNii:1

    • Development of a pressure sensor using a piezoelectric material thin film:— Application to a combustion pressure sensor for mass-produced cars — (2012)
  • AKIYAMA Morito ID: 9000283627206

    Measurement Solution Research, AIST (2012 from CiNii)

    Articles in CiNii:1

    • Development of a pressure sensor using a piezoelectric material thin film:— Application to a combustion pressure sensor for mass-produced cars — (2012)
  • Akiyama Morito ID: 9000258458257

    AIST Kyusyu Center (2009 from CiNii)

    Articles in CiNii:1

    • Development of dual frequency plasma sputtering device for AlN thin film preparation (2009)
  • Akiyama Morito ID: 9000261023023

    Measurement Solution Research Center, National Institute of Advanced Industrial Science and Technology (AIST) (2014 from CiNii)

    Articles in CiNii:1

    • Detection of Elastic Wave during Al Wire Bonding by Thin AE Sensor (2014)
  • Akiyama Morito ID: 9000345277697

    National Institute of Advanced Industrial Science and Technology (2016 from CiNii)

    Articles in CiNii:1

    • The piezoelectric MEMS process monitor as an index of the piezoelectric properties of the AlN thin films (2016)
  • Akiyama Morito ID: 9000391843967

    AIST (2003 from CiNii)

    Articles in CiNii:1

    • Development of high temperature AE sensor using AlN thin films (2003)
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