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  • 芳井 熊安 ID: 9000258635897

    大阪大学 大学院工学研究科精密科学専攻 (2003 from CiNii)

    Articles in CiNii:1

    • Deposition of Silicon Nitride Film by Atmospheric Pressure Plasma CVD-Effect of H2- (2003)
  • 芳井 熊安 ID: 9000258637238

    大阪大学 大学院工学研究科 (2004 from CiNii)

    Articles in CiNii:1

    • Hige-Rate Deposition of SiNx films by Atmospheric Pressure Plasma CVD -Optical Emission Spectroscopy of the Deposition Plasma (II)- (2004)
  • 芳井 熊安 ID: 9000258639634

    大阪大学 大学院工学研究科 精密科学専攻 (2004 from CiNii)

    Articles in CiNii:1

    • High-rate Deposition of SiNx Films by Atmospheric Pressure Plasma CVD -Optical Emission Spectroscopy of the Deposition Plasma- (2004)
  • YOSHII Kumayasu ID: 1000030029152

    大阪大学大学院工学研究科 (2005 from CiNii)

    Articles in CiNii:66

    • 大気圧RFプラズマの特性 (1995)
    • ラジカルソースMBE法を用いたSi(111)基板上AIN薄膜のエピタキシャル成長 (1995)
    • 回転電極を用いた高圧力プラズマCVDによるSi薄膜の高速成膜に関する研究(第1報) -成膜装置の試作とその成膜特性- (1996)
  • YOSHII Kumayasu ID: 9000020759446

    Articles in CiNii:1

    • Quantum Size Effects of a-Si(:H)/a-SiC(:H) Multilayer Films Prepared by rf Sputtering. (1994)
  • YOSHII Kumayasu ID: 9000020798520

    Articles in CiNii:1

    • Microstructure of a-Si/a-SiC Multilayer Films Prepared by rf Sputtering. (1994)
  • YOSHII Kumayasu ID: 9000021438804

    Articles in CiNii:1

    • Direct Observations of Crack Propagation within Electron Microscope during Extension of Pure Al Foils (1975)
  • YOSHII Kumayasu ID: 9000253324007

    Faculty of Engineering, Osaka University. (1987 from CiNii)

    Articles in CiNii:1

    • Tensile Properties of Thin Films (1987)
  • YOSHII Kumayasu ID: 9000254748182

    正会員 大阪大学工学部 (1967 from CiNii)

    Articles in CiNii:1

    • On the High-Temperature Strength of Mo-High Speed Steel Considered as a Material for High-Temperature Bearing (1967)
  • Yoshii K. ID: 9000392805664

    Department of Precision Engineering, Faculty of Engineering, Osaka University (1992 from CiNii)

    Articles in CiNii:1

    • Thermal Release of Hydrogen in Sputtered a-SiC : H Films (1992)
  • Yoshii Kumayasu ID: 9000258635903

    Osaka University (2003 from CiNii)

    Articles in CiNii:1

    • Epitaxial Growth of Si by Atmospheric Pressure Plasma CVD (IV) (2003)
  • Yoshii Kumayasu ID: 9000258637246

    Osaka University (2004 from CiNii)

    Articles in CiNii:1

    • Preparation of polycrystalline silicon films by atmospheric pressure plasma CVD (2004)
  • Yoshii Kumayasu ID: 9000258641270

    Osaka University (2005 from CiNii)

    Articles in CiNii:1

    • High-Rate Synthesis of Diamond by Atmospheric Pressure Plasma Chemical Vapor Deposition (2005)
  • Yoshii Kumayasu ID: 9000258645290

    Osaka University (2005 from CiNii)

    Articles in CiNii:1

    • Ultrahigh-Rate Deposition of Amorphous Silicon Films by Atmospheric Pressure Plasma Chemical Vapor Deposition (2005)
  • Yoshii Kumayasu ID: 9000258645298

    Osaka University (2005 from CiNii)

    Articles in CiNii:1

    • Growth of Si thin film on SiO<sub>2</sub> substrate with Ge islands (2005)
  • Yoshii Kumayasu ID: 9000258645310

    Osaka University (2005 from CiNii)

    Articles in CiNii:1

    • Modification of substrate surface by Ge island formation for growth of large-grained poly-Si thin film (2005)
  • Yoshii Kumayasu ID: 9000283806629

    Osaka University (2003 from CiNii)

    Articles in CiNii:1

    • Deposition of Silicon Nitride Film by Atmospheric Pressure Plasma CVD - Investigation of Film Structure by TDS - (2003)
  • Yoshii Kumayasu ID: 9000391990712

    Osaka University (2002 from CiNii)

    Articles in CiNii:1

    • Epitaxial Growth of Si by Atmospheric Pressure Plasma CVD(III) : Effect of Temperature on Growth rate (2002)
  • Yoshii Kumayasu ID: 9000391990718

    Osaka University (2002 from CiNii)

    Articles in CiNii:1

    • Deposition of Silicon Nitride Film by Atmospheric Pressure Plasma CVD Method with Rotary Electrode -Optimization of NH3/SiH4 ratio- (2002)
  • Yoshii Kumayasu ID: 9000392796196

    Faculty of Engineering, Osaka University (1976 from CiNii)

    Articles in CiNii:1

    • Electoron Microscope Studies on the Structures Developed in the Necked Region of Al Specimens by Extension (1976)
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