Search Results1-20 of  199

  • DOI Toshiro K. ID: 9000329414643

    KASTEC Kyushu University (2015 from CiNii)

    Articles in CiNii:1

    • WeC-2-4 PLASMA FUSION CHEMICAL MECHANICAL POLISHING OF ULTRA-HARD-TO-PROCESS MATERIALS : Basic process characteristics for GaN substrate and prospective application toward diamond substrate (2015)
  • DOI Toshiro K. ID: 9000379072906

    九州大学グローバルイノベーションセンター (2018 from CiNii)

    Articles in CiNii:1

    • Industry-Academia-Government Collaborations Aiming to Establish Ultra-Precision Processing and Its Applications:—Potentiality of the Evolution toward Singularity-Focused Innovation— (2018)
  • DOI Toshiro K. ID: 9000392174609

    Kyushu Univ. KASTEC (2016 from CiNii)

    Articles in CiNii:1

    • Study of the polishing process technology of the crystal substrate for green devices:-Development of a new process to realize a processing time reduction of the SiC substrate- (2016)
  • DOI Toshiro ID: 9000001479866

    The University of Arizona, Department of Chemical and Environmental Engineering (2005 from CiNii)

    Articles in CiNii:1

    • Development and Analysis of a High-Pressure Micro Jet Pad Conditioning System for Interlayer Dielectric Chemical Mechanical Planarization (2005)
  • DOI Toshiro ID: 9000017060938

    九州大学大学院 (2010 from CiNii)

    Articles in CiNii:15

    • Nanotopography in planarization CMP, and a new double-sided simultaneous polishing machine with micro-motion mechanism aimed at nanotopography reduction (2004)
    • High efficiency CMP technology with a closed atmosphere control bell-jar type polishing machine (2008)
    • The impact of wafer edge profile on polishing performance in silicon wafer manufacturing (2009)
  • DOI Toshiro ID: 9000017572943

    Department of Mechanical Engineering, Graduate School, Kyushu University (2009 from CiNii)

    Articles in CiNii:1

    • GDN-01 INFLUENCE OF GEAR ECCENTRICITY ON SIDEBANDS OF MESH FREQUENCY : DERIVATION AND DETECTION OF AMPLITUDE MODULATION BY TRANSMISSION ERROR MEASUREMENT(DYNAMICS AND NOISE PROBLEMS OF GEARS AND GEAR BOXES) (2009)
  • DOI Toshiro ID: 9000018755288

    九州大学大学院 (2012 from CiNii)

    Articles in CiNii:2

    • Spatial Location Finding of Sound Source Using Handy Microphone Array System Based on SSP-MUSIC Method (2012)
    • 4-226 Effect of Cooperative Research Activities on Student's Humanity and Skill Up in Laboratory Education : Educational Activities in Laboratories at Kanazawa Institute of Technology and Kyushu University (2011)
  • DOI Toshiro ID: 9000019059161

    Department of Mechanical Engineering, Graduate School of Engineering, Kyushu University (2012 from CiNii)

    Articles in CiNii:1

    • Fast Diffusion of Water Molecules into Chemically Modified SiO_2 Films Formed by Chemical Vapor Deposition (2012)
  • DOI Toshiro ID: 9000019142611

    九州大学 (2012 from CiNii)

    Articles in CiNii:6

    • CMP slurry recycle technique and its impact (2012)
    • 半導体基板の平滑化加工技術 (特集 表面処理技術の展望) (2003)
    • CMP特性に及ぼすパッド溝断面の傾斜角の影響 (2003)
  • DOI Toshiro ID: 9000019949320

    九州大学大学院工学研究院 (2011 from CiNii)

    Articles in CiNii:1

    • Improvement of CFRP pipe's Burst Strength with SPWC Method (2011)
  • DOI Toshiro ID: 9000019961755

    九州大学 大学院工学研究院 (2009 from CiNii)

    Articles in CiNii:1

    • Study of Copper Residue Generated During Cu CMP Process:- Reduction of Copper Residue Between Metal Patterns - (2009)
  • DOI Toshiro ID: 9000019967516

    九州大学 大学院工学研究院 (2009 from CiNii)

    Articles in CiNii:1

    • Development of Abrasive-Free Copper CMP Process:- Reduction of Copper Residue Using Randomly Formed Polyurethane Pad - (2009)
  • DOI Toshiro ID: 9000019967569

    九州大学大学院工学研究院 (2009 from CiNii)

    Articles in CiNii:1

    • An Analysis of Particles in Spray Cleaning and A Study on their Cleaning Efficiency:- A Comparison of Cleaning Efficiency between Two Fluid Spray and High Pressure Micro Jet Spray - (2009)
  • DOI Toshiro ID: 9000019967787

    九州大学大学院工学研究院 (2010 from CiNii)

    Articles in CiNii:1

    • Development on Pad Conditioning Conforming to Pad Surface:—Development on Flexible Fiber Conditioner and Evaluation on Conditioning Uniformity— (2010)
  • DOI Toshiro ID: 9000019968912

    The Planarization and CMP Technical Committee (2012 from CiNii)

    Articles in CiNii:1

    • 躍動感あふれる超精密プラナリゼーションCMP技術の広い応用分野とその発展に向けて (2012)
  • DOI Toshiro ID: 9000019973935

    九州大学大学院工学研究院 (2010 from CiNii)

    Articles in CiNii:1

    • Research on Cleaning Efficiency of High Pressure Micro Jet:—Influence of different shape nozzles in cleaning efficiency— (2010)
  • DOI Toshiro ID: 9000019987983

    九州大学 大学院工学研究院 (2009 from CiNii)

    Articles in CiNii:1

    • CMP Process Development for Cu/Low-k Interconnect Schemes:- Low Selective Approach to Barrier Metal Polish for Topography Correction - (2009)
  • DOI Toshiro ID: 9000020081608

    Department of Mechanical Engineering, Kyushu University (2012 from CiNii)

    Articles in CiNii:1

    • Wear Resistance of Coating Films on Hob Teeth:(Intermittent Cutting Tests with a Flytool) (2012)
  • DOI Toshiro ID: 9000020129207

    Department of Mechanical Engineering, Graduate School, Kyushu University (2012 from CiNii)

    Articles in CiNii:1

    • Real-Time Evaluation of Tool Flank Wear by In-Process Contact Resistance Measurement in Face Milling (2012)
  • DOI Toshiro ID: 9000020211343

    Kyushu University Dept. of Mechanical Engineering (2011 from CiNii)

    Articles in CiNii:1

    • Wear-Resistance of Coating Films on Hob Cutting Teeth (Intermittent Cutting Tests with a Flytool) (2011)
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