Search Results1-11 of  11

  • ENAMI Tatsuo ID: 9000005603041

    Laser Research Department, Research Division, Komatsu Ltd.:Department of Electrical and Electronic Systems Engineering, Kyushu University (2000 from CiNii)

    Articles in CiNii:9

    • Narrow-Linewidth Krf Excimer Laser Using a Self-Amplification Resonator (1995)
    • Development of an Excimer Laser for Lithography (1996)
    • Durability evaluation of 1kHz ArF excimer laser for lithography (1999)
  • ENAMI Tatsuo ID: 9000253690515

    Department of Electronics and Electrical Engineering, Faculty of Engineering, Fukui University (1989 from CiNii)

    Articles in CiNii:1

    • High brightness excimer laser oscillator-amplifier. (1989)
  • ENAMI Tatsuo ID: 9000253694707

    Manufacturing Engineering Research Center, TOSHIBA (1995 from CiNii)

    Articles in CiNii:1

    • Narrow-Linewidth KrF Excimer Laser Using a Self-Amplification Resonator. (1995)
  • ENAMI Tatsuo ID: 9000253698109

    Laser Research Department,Research Center,Research Division,Komatsu Ltd. (1999 from CiNii)

    Articles in CiNii:1

    • Highly Energy-Stabilized and Narrow Band Excimer Laser for Steppers. (1999)
  • Enami Tatsuo ID: 9000253698624

    Komatsu Ltd. Research Div. (1999 from CiNii)

    Articles in CiNii:1

    • レーザー装置 (1999)
  • Enami Tatsuo ID: 9000258144364

    Laser Research Department, Research Division, Komatsu Ltd., 1200 Manda, Hiratsuka, Kanagawa 254–8567, Japan (1999 from CiNii)

    Articles in CiNii:1

    • Performance Improvement of a Discharge-Pumped ArF Excimer Laser by Xenon Gas Addition. (1999)
  • Enami Tatsuo ID: 9000258148692

    Laser Research Department, Research Division, Komatsu Ltd., 1200 Manda, Hiratsuka, Kanagawa 254-8567, Japan|Department of Electrical and Electronic Systems Engineering, Kyushu University, Hakozaki, Fukuoka 812-8581, Japan (2000 from CiNii)

    Articles in CiNii:1

    • Dynamics of Output Spectra within a Single Laser Pulse from a Line-Narrowed Excimer Laser. (2000)
  • Enami Tatsuo ID: 9000391526925

    Komatsu Ltd. (1999 from CiNii)

    Articles in CiNii:1

    • Studies of Photoionization Processes of Gas Mixtures for Excimer Laser Discharges (1999)
  • Enami Tatsuo ID: 9000401684238

    Articles in CiNii:1

    • Performance Improvement of a Discharge-Pumped ArF Excimer Laser by Xenon Gas Addition (1999)
  • Enami Tatsuo ID: 9000401684516

    Articles in CiNii:1

    • Development of a 2 kHz F2Laser for 157 nm Lithography (1999)
  • Enami Tatsuo ID: 9000401693438

    Articles in CiNii:1

    • Dynamics of Output Spectra within a Single Laser Pulse from a Line-Narrowed Excimer Laser (2000)
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