Search Results1-20 of  26

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  • HIROFUJI Yuichi ID: 9000004813058

    Kyoto Research Laboratory, Matsushita Electronics Corporation (1996 from CiNii)

    Articles in CiNii:1

    • Particle Growth Caused by Film Deposition in VLSI Manufacturing Process (1996)
  • HIROFUJI Yuichi ID: 9000404668157

    Nanomaterials Microdevices Research Center, Osaka Institute of Technology (2019 from CiNii)

    Articles in CiNii:1

    • Characteristics of the Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Thin Films Grown by a Chemical Solution Deposition Method (2019)
  • HIROFUJI Yuichi ID: 9000404668169

    Nanomaterials Microdevices Res. Center, Osaka Inst. of Tech. (2019 from CiNii)

    Articles in CiNii:1

    • Fabrication and Characterization of Silk Fibroin Films by a Spin-Coating Method Toward the Application to Field-Effect Transistor-Based Biosensors (2019)
  • Hirofuji Yuichi ID: 9000004872374

    Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd. (1994 from CiNii)

    Articles in CiNii:1

    • Identification of the Particle Source in LSI Manufacturing Process Equipment (Special Issue on Quarter Micron Si Device and Process Technologies) (1994)
  • Hirofuji Yuichi ID: 9000252761494

    Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd. (1989 from CiNii)

    Articles in CiNii:1

    • Doping of Trench Side-Walls Using an Arsenic Planar-Type Solid-Diffusion Source (S-D Source) and Analysis of Doping Uniformity by Secondary Ion Mass Spectroscopy (SIMS) (1989)
  • Hirofuji Yuichi ID: 9000252942497

    Electrotechnical Laboratory (1976 from CiNii)

    Articles in CiNii:1

    • Molecular Beam Epitaxial Growth of InP (1976)
  • Hirofuji Yuichi ID: 9000252946150

    Articles in CiNii:1

    • <I>C</I>-<I>V</I> Characteristics of Al/Vacuum-Evaporated-SiO<SUB><I>x</I>(1∼2)</SUB>/GaAs Systems (1979)
  • Hirofuji Yuichi ID: 9000252956300

    Central Research Laboratory, Matsushita Electric Ind. Co., Ltd. (1985 from CiNii)

    Articles in CiNii:1

    • Si-Beam Radiation Cleaning in Molecular-Beam Epitaxy (1985)
  • Hirofuji Yuichi ID: 9000252956342

    Central Research Laboratory Matsushita Electric Ind. Co., Ltd. (1985 from CiNii)

    Articles in CiNii:1

    • H<SUB>2</SUB>-Enhanced Epitaxial Regrowth of Polycrystalline Silicon through Natural Oxide Layers on Silicon Substrates (1985)
  • Hirofuji Yuichi ID: 9000252961399

    Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd. (1987 from CiNii)

    Articles in CiNii:1

    • PIG-Type Compact Microwave Metal Ion Source (1987)
  • Hirofuji Yuichi ID: 9000252963534

    Semiconductor Reseach Center, Matsushita Electric Industrial Co., Ltd. (1988 from CiNii)

    Articles in CiNii:1

    • Low-Energy Double-Ion-Beam Deposition System (1988)
  • Hirofuji Yuichi ID: 9000254439406

    Matsushita Electric Industrial Co., Ltd. (1991 from CiNii)

    Articles in CiNii:1

    • The Cleaning Technology Using the D.I. Water for SMT. The Cleaning Techniques of Silicon Wafers Using the D.I. Water for ULSI Fabrication Process.:—The Cleaning Techniques of Silicon Wafers Using the D. I. Water for ULSI Fabrication Process— (1991)
  • Hirofuji Yuichi ID: 9000392681733

    Articles in CiNii:1

    • Molecular Beam Epitaxial Growth of InP (1976)
  • Hirofuji Yuichi ID: 9000392695782

    Articles in CiNii:1

    • H<SUB>2</SUB>-Enhanced Epitaxial Regrowth of Polycrystalline Silicon through Natural Oxide Layers on Silicon Substrates (1985)
  • Hirofuji Yuichi ID: 9000392695804

    Articles in CiNii:1

    • Si-Beam Radiation Cleaning in Molecular-Beam Epitaxy (1985)
  • Hirofuji Yuichi ID: 9000392700151

    Articles in CiNii:1

    • PIG-Type Compact Microwave Metal Ion Source (1987)
  • Hirofuji Yuichi ID: 9000392704202

    Articles in CiNii:1

    • Doping of Trench Side-Walls Using an Arsenic Planar-Type Solid-Diffusion Source (S-D Source) and Analysis of Doping Uniformity by Secondary Ion Mass Spectroscopy (SIMS) (1989)
  • Hirofuji Yuichi ID: 9000392709210

    Articles in CiNii:1

    • Low-Energy Double-Ion-Beam Deposition System (1988)
  • Hirofuji Yuichi ID: 9000401581096

    Articles in CiNii:1

    • Molecular Beam Epitaxial Growth of InP (1976)
  • Hirofuji Yuichi ID: 9000401585493

    Articles in CiNii:1

    • 1979-04 (1979)
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