Search Results1-20 of  290

  • Hori Masaru ID: 9000018879631

    Articles in CiNii:1

    • Floating Wire for Enhancing Ignition of Atmospheric Pressure Inductively Coupled Microplasma (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials) (2012)
  • Hori Masaru ID: 9000025017640

    Articles in CiNii:1

    • Contrast enhancement of wavelength-selective detection of mid-infrared using localized atmospheric-pressure plasma treatment (Special issue: Solid state devices and materials) (2010)
  • HORI Masaru ID: 9000001235711

    Department of Quantum Engineering, School of Engineering, Nagoya University (2004 from CiNii)

    Articles in CiNii:1

    • High Performance of Silicon Oxide Selective Etching Using F_2 Gas and Graphite Instead of Perfluorinated Compound Gases (2004)
  • HORI Masaru ID: 9000001814019

    Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University (2007 from CiNii)

    Articles in CiNii:2

    • Atmospheric Pressure Fluorocarbon-Particle Plasma Chemical Vapor Deposition for Hydrophobic Film Coating (2006)
    • Temperature and Density of CF Radicals in 60MHz Capacitively Coupled Fluorocarbon Gas Plasma (2007)
  • HORI Masaru ID: 9000002173699

    Department of Electrical Engineering and Computer Science, Nagoya University (2009 from CiNii)

    Articles in CiNii:3

    • Electrical Characterization of Carbon Nanowalls (2006)
    • Control of Electric Conduction of Carbon Nanowalls (2007)
    • Synthesis of Platinum Nanoparticles on Two-Dimensional Carbon Nanostructures with an Ultrahigh Aspect Ratio Employing Supercritical Fluid Chemical Vapor Deposition Process (2009)
  • HORI Masaru ID: 9000002175685

    Nagoya Univ., Dept. of Electric Engineering and Computer Science (2007 from CiNii)

    Articles in CiNii:1

    • Generation Mechanism of Etching Damages on Low-k SiOCH Films and Development of Novel Damage Evaluation Technique (2007)
  • HORI Masaru ID: 9000002175879

    Electrical Engineering & Computer Science, Graduate School of Engineering, Nagoya University (2007 from CiNii)

    Articles in CiNii:1

    • Si Oxidation Mechanism in Ar/O_2 Surface Wave Plasma (2007)
  • HORI Masaru ID: 9000005623784

    ULSI Research Center, Toshiba Corporation (1989 from CiNii)

    Articles in CiNii:1

    • Fabrication of an ultra Low Stress Tungsten Absorber for X-Ray Masks : Lithography Technology : (1989)
  • HORI Masaru ID: 9000006401570

    名古屋大学大学院工学研究科:名古屋大学プラズマナノ工学研究センター (2007 from CiNii)

    Articles in CiNii:1

    • Development of Environmentally Friendly Zero-Emission and Recycle Nano-Etching Process (2007)
  • HORI Masaru ID: 9000015594414

    Department of Quantum Engineering, Graduate School of Engineering, Nagoya University (2003 from CiNii)

    Articles in CiNii:3

    • Synthesis of Polytetrafluoroethylene-like Films by a Novel Plasma Enhanced Chemical Vapor Deposition Employing Solid Material Evaporation Technique (2003)
    • Plasma Induced Subsurface Reactions for Anisotropic Etching of Organic Low Dielectric Film Employing N_2 and H_2 Gas Chemistry (2003)
    • Effects of Oxygen and Nitrogen Atoms on SiOCH Film Etching in Ultrahigh-Frequency Plasma (2003)
  • HORI Masaru ID: 9000016373186

    Department of Electrical Engineering and Computer Science, Nagoya University (2012 from CiNii)

    Articles in CiNii:5

    • Octave Spanning High Quality Super Continuum Generation Using 10nJ and 104fs High Energy Ultrashort Soliton Pulse (2008)
    • Combinatorial Plasma Etching Process (2009)
    • Critical Factors for Nucleation and Vertical Growth of Two Dimensional Nano-Graphene Sheets Employing a Novel Ar^+ Beam with Hydrogen and Fluorocarbon Radical Injection (2010)
  • HORI Masaru ID: 9000016375781

    Graduate School of Engineering, Nagoya University (2008 from CiNii)

    Articles in CiNii:1

    • New Compact Continuous Spectrum Light Source Using Atmospheric Pressure Microplasma with High-Velocity Ar Gas Flow (2008)
  • HORI Masaru ID: 9000018264904

    Nagoya University (2003 from CiNii)

    Articles in CiNii:2

    • 第7回 「科学と生活のフェスティバル」 報告 (2001)
    • Overview of Science Fair "Plasma World" (2003)
  • HORI Masaru ID: 9000020204882

    Department of Electronic-Mechanical Engineering, Nagoya University (1986 from CiNii)

    Articles in CiNii:1

    • Total dry electron-beam vacuum lithography system using 4 rotary chambers. (1986)
  • HORI Masaru ID: 9000020934090

    Department of Electrical Engineering and Computer Science, Nagoya University (2012 from CiNii)

    Articles in CiNii:1

    • Dry De-smear of Via Bottom Residue Using 60 Hz Nonequilibrium Atmospheric Pressure Plasma with Trifluoromethyle Trifluorovinyl Ether Mixing Gas (2012)
  • HORI Masaru ID: 9000021755200

    Nature Conservation Committee of Wakayama Prefecture (1979 from CiNii)

    Articles in CiNii:1

    • A Study of the Boundary Area of Profitable Cultivation of Satsuma Mandarin (<i>Citrus unshiu</i> Marc.) in the Valley of Kino River from the View Point of Natural Vegetation (1979)
  • HORI Masaru ID: 9000107311402

    Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University (2007 from CiNii)

    Articles in CiNii:1

    • Silicon Oxide Selective Etching Employing Dual Frequency Superimposed Magnetron Sputtering of Carbon Using F_2/Ar Gases (2007)
  • HORI Masaru ID: 9000107317351

    Department of Electrical Engineering and Computer Science, Nagoya University (2005 from CiNii)

    Articles in CiNii:1

    • Development of Compact C_2F_4 Gas Supply Equipment and Its Application to Etching of Dielectrics in an Environmental Benign Process (2005)
  • HORI Masaru ID: 9000107327451

    Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University (2006 from CiNii)

    Articles in CiNii:1

    • Low-k SiOCH Film Etching Process and Its Diagnostics Employing Ar/C_5F_<10>O/N_2 Plasma (2006)
  • HORI Masaru ID: 9000107333153

    Department of Quantum Engineering, Graduate School of Engineering, Nagoya University (2003 from CiNii)

    Articles in CiNii:1

    • Effects of Driving Frequency on the Translational Temperature and Absolute Density of Si Atoms in Very High Frequency Capacitively Coupled SiF_4 Plasmas (2003)
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