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  • IOKU Sunao ID: 9000001632132

    Division of Electrical Engineering and Computer Sciences, Graduate School of Engineering, University of Hyogo (2005 from CiNii)

    Articles in CiNii:2

    • Novel Micro Gyroscope with High-Q Rotational Vibration Structure (2005)
    • Quantitative Analysis and Influence of CO_2 Absorbed in TMAH Solution for Silicon Etching (2003)
  • IOKU Sunao ID: 9000005001859

    University of Hyogo (2005 from CiNii)

    Articles in CiNii:8

    • Study of Ni-W alloy as a MEMS Material (1999)
    • Time Shared Driving and Detection System for Micro Vibratory Gyroscope with Single Vibration Coil (2004)
    • Direct and Maskless Exposure System for MEMS Fabrication (2005)
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