Search Results1-11 of  11

  • ITOGA KENJI ID: 9000247079427

    MITSUBISHI ELECTRIC CORP. CENTRAL RESEARCR LABORATORY (1989 from CiNii)

    Articles in CiNii:1

    • 28a-SA-8 A D.C. BEAN MONITOR USING DIVIDED AMORPHOUS CORES (1989)
  • ITOGA KENJI ID: 9000253032574

    Advanced Technology R&D Center, Mitsubishi Electric Corp. (1996 from CiNii)

    Articles in CiNii:1

    • Performance of SR Lithography in Giga-bit DRAM Fabrication. (1996)
  • ITOGA Kenji ID: 9000000007873

    Advanced Technology R & D Center, Mitsubishi Electric Corp. (1995 from CiNii)

    Articles in CiNii:2

    • A New Methodology of Optical Alignment of SR Lithography Beamline (1995)
    • SR Lithography Beamline System (1994)
  • ITOGA Kenji ID: 9000003411073

    Mitsubishi Electric Corp. (2003 from CiNii)

    Articles in CiNii:5

    • Resolution improvement methods in x-ray lithography (2003)
    • Progress of second generation Proximity X-Ray Lithography (PXL-II) Technology (2002)
    • 第二世代X線リソグラフィ (2002)
  • ITOGA Kenji ID: 9000005716660

    Advanced Technology R&D Center, Mitsubishi Electric Corporation (2003 from CiNii)

    Articles in CiNii:5

    • Analysis of Overlay Accuracy in 0.14μm Device Fabrication using Synchrotron Radiation Lithography (1997)
    • Pattern Resolution in X-ray Lithography Using Pattern Replication Technique on a Mask (2003)
    • Performance of SR Lithography in Giga-bit DRAM Fabrication (1996)
  • Itoga Kenji ID: 9000258134804

    Advanced Technology R&D Center, Mitsubishi Electric Corp., 8–1–1 Tsukaguchi–Honmachi, Amagasaki, Hyogo 661, Japan (1997 from CiNii)

    Articles in CiNii:1

    • Critical Dimension Control in Synchrotron Radiation Lithography Using a Negative-Tone Chemical Amplification Resist. (1997)
  • Itoga Kenji ID: 9000258159835

    Advanced Technology R&D Center, Mitsubishi Electric Corporation, 8-1-1 Tsukagchi-Honmachi, Amagasaki, Hyogo 661-8661, Japan (2002 from CiNii)

    Articles in CiNii:1

    • 50nm Pattern Printing by Narrowband Proximity X-Ray Lithography. (2002)
  • Itoga Kenji ID: 9000401664378

    Articles in CiNii:1

    • 1997-06-15 (1997)
  • Itoga Kenji ID: 9000401668067

    Articles in CiNii:1

    • Critical Dimension Control in Synchrotron Radiation Lithography Using a Negative-Tone Chemical Amplification Resist (1997)
  • Itoga Kenji ID: 9000401711425

    Articles in CiNii:1

    • 50 nm Pattern Printing by Narrowband Proximity X-Ray Lithography (2002)
  • Itoga Kenji ID: 9000401716943

    Articles in CiNii:1

    • Pattern Resolution in X-ray Lithography Using Pattern Replication Technique on a Mask (2003)
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