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  • KASHIHARA Nobuki ID: 9000001438219

    Innovation Plaza Hiroshima, JST (Japan Science and Technology Agency) (2005 from CiNii)

    Articles in CiNii:2

    • Effects of Gas Flow Rate on Particulate Contamination in a PECVD Reactor (2005)
    • 次世代プラズマプロセスの開発 (特集 次世代科学技術の展望) (2004)
  • KASHIHARA Nobuki ID: 9000021939331

    Department of Chemical Engineering, Graduate School of Engineering, Hiroshima University|Adtec Plasma Technology Co., Ltd. (2005 from CiNii)

    Articles in CiNii:1

    • Suppression of Dust Particle Contamination in a SiH<sub>4</sub>/H<sub>2</sub> Plasma CVD Reactor Using a New Type of Modulated Plasma (2005)
  • Kashihara Nobuki ID: 9000254731871

    Innovation Plaza Hiroshima, JST (Japan Science and Technology Agency) (2005 from CiNii)

    Articles in CiNii:1

    • Effects of Gas Flow Rate on Particulate Contamination in a PECVD Reactor (2005)
  • Kashihara Nobuki ID: 9000267773072

    Articles in CiNii:1

    • Suppression of particle generation in a plasma process using a sine-wave modulated rf plasma (2006)
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