Search Results1-20 of  30

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  • Kawada Hiroki ID: 9000009744183

    Articles in CiNii:1

    • Analysis of Line-edge Roughness in Resist Patterns and Its Transferability as Origins of Device Performance Degradation and Variation (2003)
  • KAWADA Hiroki ID: 9000000007657

    Mechanical Engineering Research Laboratory, Hitachi Ltd. (2001 from CiNii)

    Articles in CiNii:6

    • Adsorption and Decomposition of CHF_3 and O_2 on Al(111) (1995)
    • Analysis of Incident Ions Inner Surface of Magnetic Microwave Plasma Etching Chamber (1999)
    • In Situ Analysis of Residues Formed on Inner Surface of Al Etching Chamber (2000)
  • KAWADA Hiroki ID: 9000000033458

    Mechanical Engineering Research Laboratory, Hitachi Ltd. (1998 from CiNii)

    Articles in CiNii:1

    • In Situ Analysis of Residue on Inner Surface of Dry Etching Chamber Using Fourier Transform Infrared Spectroscopy (1998)
  • KAWADA Hiroki ID: 9000002177589

    Hitachi High-Technologies Corp. (2007 from CiNii)

    Articles in CiNii:1

    • Characterization of Line-edge Roughness in Cu/low-k Interconnect Pattern (2007)
  • KAWADA Hiroki ID: 9000005597770

    School of Science and Engineering, Waseda University:Kagami-Memorial Laboratory for Materials Science and Technology, Waseda University (1999 from CiNii)

    Articles in CiNii:2

    • Dominant Role of Corner Holes in the Decomposition Process of Silicon Islands on Si(111) Surfaces (1999)
    • Consideration on the Quantitativeness of Reflection High Energy Electron Diffraction Intensity as a Tool to Monitor the Coverage of the Si(111) Surface by 7×7 Domains (1999)
  • KAWADA Hiroki ID: 9000017550823

    Hitchi High-Technologies Corp. (2010 from CiNii)

    Articles in CiNii:5

    • Critical Dimension Measurement Technology Using CD-SEM (2006)
    • 65nmプロセスノードに対応するCD-SEM技術 (特集1 ナノメートル時代の最先端半導体デバイスの量産を支えるベストソリューション) (2004)
    • 65nmプロセスノード対応の測長SEM (特集 最先端半導体デバイスの量産を支えるベストソリューション) (2003)
  • KAWADA Hiroki ID: 9000020321641

    Mechanical Engineering Research Lab., Hitachi, Ltd. (2000 from CiNii)

    Articles in CiNii:1

    • サマリー・アブストラクト (2000)
  • KAWADA Hiroki ID: 9000021466883

    Mechanical Engineering Research Laboratory, Hitachi Ltd. (1995 from CiNii)

    Articles in CiNii:1

    • サマリー・アブストラクト (1995)
  • KAWADA Hiroki ID: 9000021530140

    Mechanical Engineering Research Laboratory (1991 from CiNii)

    Articles in CiNii:1

    • Simulation of thickness distribution of thin film grown by molecular beam epitaxy. (1991)
  • KAWADA Hiroki ID: 9000021531073

    Mechanical Engineering Research Laboratory, Hitachi, Ltd. (1999 from CiNii)

    Articles in CiNii:1

    • サマリー・アブストラクト (1999)
  • KAWADA Hiroki ID: 9000021580688

    Mechanical Engineering Research Laboratory, Hitachi, Ltd. (1998 from CiNii)

    Articles in CiNii:1

    • サマリー・アブストラクト (1998)
  • KAWADA Hiroki ID: 9000107374737

    Hitachi High-Technologies Corporation (2005 from CiNii)

    Articles in CiNii:1

    • Impact of Long-Period Line-Edge Roughness (LER) on Accuracy in Critical Dimension (CD) Measurement and New Guideline for CD Metrology (2005)
  • KAWADA Hiroki ID: 9000237760573

    Mie Junior and Senior High School (2018 from CiNii)

    Articles in CiNii:33

    • 12I-101 教員が発案した外部連携の事例報告 : 地元の干潟の再発見(環境教育・STS学習・総合的学習,一般研究発表(口頭発表)) (2012)
    • 12I-102 企業主催の教育イベントを活用した理科教育実践(環境教育・STS学習・総合的学習,一般研究発表(口頭発表)) (2012)
    • C01 Nature Observation Learning in Summer School Camp (2012)
  • KAWADA Hiroki ID: 9000240250535

    岐阜聖徳学園大学 (2012 from CiNii)

    Articles in CiNii:1

    • A09 中学校理科における学習意欲を喚起する教材の開発と評価 : Salters Advanced Chemistryを参考にして (2012)
  • KAWADA Hiroki ID: 9000304689941

    Nihon University, Mechanical Engineering (2016 from CiNii)

    Articles in CiNii:3

    • Analysis of craniotomy type head impact experiment (2015)
    • J0250104 Study of material properties of the head simulation model (2014)
    • 2C31 Computer analysis based on pathological observations of head injury (2016)
  • KAWADA Hiroki ID: 9000386213302

    Department of Mechanical Engineering, Saitama University (2017 from CiNii)

    Articles in CiNii:1

    • Development of accelerometer with Zero-Compliance Mechanism ( 1st report ) Principle of Measurement (2017)
  • KAWADA Hiroki ID: 9000397682521

    Department of Mechanical Engineering, Saitama University (2018 from CiNii)

    Articles in CiNii:1

    • Force Measurement Using Zero-Compliance Mechanism (2018)
  • KAWADA Hiroki ID: 9000402923406

    Mie Junior and Senior High School (2018 from CiNii)

    Articles in CiNii:1

    • Radiation Education Class for Parents and Children (2018)
  • KAWADA Hiroki ID: 9000402924885

    Mie Senior and Junior High School (2018 from CiNii)

    Articles in CiNii:1

    • A Lesson Plan Dealing with Electrical Transmission and Exchange in Junior High School Third Grade:- Through Practice for 4 years - (2018)
  • KAWADA Hiroki ID: 9000402943225

    Mie Junior and Senior High School (2019 from CiNii)

    Articles in CiNii:1

    • Approach to learn science using educational travel (2019)
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