Search Results1-5 of  5

  • KIKUIRI Nobutaka ID: 9000000066410

    Toshiba Research and Development Center, Toshiba Corporation (1995 from CiNii)

    Articles in CiNii:1

    • A Mask-to-Wafer Fine Gap Setting Method (1995)
  • KIKUIRI Nobutaka ID: 9000002955313

    (株)東芝 機械・エネルギー研究所 (1997 from CiNii)

    Articles in CiNii:3

    • 微動機構を用いたスライダの超精密定速送り技術 (1995)
    • 光ディスク原盤記録機用スピンドルの非同期回転振れの計測 (1997)
    • Control Method for Helium Gas Pressure and Concentration in X-ray Steppers (1996)
  • KIKUIRI Nobutaka ID: 9000020655745

    Articles in CiNii:1

    • A dual grating alignment method insensitive to mask-wafer gap variation. (1988)
  • KIKUIRI Nobutaka ID: 9000020676512

    Articles in CiNii:1

    • A gap setting method for X-ray lithography using dual gratings. (1989)
  • KIKUIRI Nobutaka ID: 9000022200132

    Articles in CiNii:1

    • A Mask-to-wafer Fine Gap Setting Method. (1993)
Page Top