Search Results1-20 of  154

  • Kinoshita Hiroo ID: 9000009563955

    Articles in CiNii:1

    • Present Status and Future Prospects of EUV Lithography (1997)
  • Kinoshita Hiroo ID: 9000009564958

    Articles in CiNii:1

    • Experimental EUV Exposure System Using a Synchrotron Source (1998)
  • Kinoshita Hiroo ID: 9000009565354

    Articles in CiNii:1

    • Current Status of EUV Lithography (2000)
  • Kinoshita Hiroo ID: 9000010400461

    Articles in CiNii:1

    • Development of EUV resists in University of Hyogo (2007)
  • Kinoshita Hiroo ID: 9000010652908

    Articles in CiNii:1

    • Current status and prospect of extreme ultraviolet lithography (2008)
  • Kinoshita Hiroo ID: 9000025058733

    Articles in CiNii:1

    • Effect of amine additive in photoacid generator bonded resist for extreme ultraviolet and electron beam lithography (Special issue: Microprocesses and nanotechnology) (2009)
  • Kinoshita Hiroo ID: 9000241566416

    Articles in CiNii:1

    • Recent Activities on Extreme Ultraviolet Lithography in NewSUBARU (Special Issue : Microprocesses and Nanotechnology) (2013)
  • Kinoshita Hiroo ID: 9000255323682

    Articles in CiNii:1

    • A Study of Acid Diffusion Behaviors of PAG by using Top Coat Method for EUVL (2014)
  • KINOSHITA Hiroo ID: 9000000027763

    姫工大 (1999 from CiNii)

    Articles in CiNii:4

    • 光学,産業応用セッション(SRI'97報告) (1997)
    • 極端紫外線露光用非球面光学系合わせ方法の開発 (1999)
    • Imaging Components and Optical Instruments (1997)
  • KINOSHITA Hiroo ID: 9000000036756

    Next Generation Catalyst Research Institute Co., Ltd., KSP R&D Bldg. (2000 from CiNii)

    Articles in CiNii:3

    • Effect of hydrocarbon on SOx poisoning over NOx selective reduction catalysts (1997)
    • Poisoning of NO_x Selective Reduction Catalysts by Lubricating Oil Additives -Effects of lubricating oil additives on catalytic activity and condition- (1998)
    • SO_x Poisoning on Rh Catalysts for NO_x Selective Reduction (2000)
  • KINOSHITA Hiroo ID: 9000000045285

    寄神建設株式会社 海洋部 (2000 from CiNii)

    Articles in CiNii:2

    • Technical Development of Construction Barge for Offshore Construction (1998)
    • 油圧ハンマ方式によるサンドコンパクション船 - YS-HHM工法 - (2000)
  • KINOSHITA Hiroo ID: 9000000197193

    Next Generation Catalyst Research Intitute, Co., Ltd. (1999 from CiNii)

    Articles in CiNii:4

    • Pt-B Catalyst Supported on Phosphates for controlling Emissions of NOx, CO and Hydrocarbon at Low Temperatures (1996)
    • Effect of Pt Precursors on N_2/N_2O Selectivity for Selective Reduction of NO by Hydrocarbon on Supported Pt Catalysts (1999)
    • A New and Convenient Wittig-type Reaction for the Preparation of Pyrromethenone Derivative (1993)
  • KINOSHITA Hiroo ID: 9000000255454

    University of Hyogo, Center for Extreme Ultraviolet Lithography (2012 from CiNii)

    Articles in CiNii:4

    • New horizon in application of radiation, ion beam and plasma technology and their measurement techniques (2000)
    • 半導体デバイス作製と密接にかかわるビーム応用,放射線・プラズマ分野 (1999)
    • Multilevel interconnect technology in ULSI's (1999)
  • KINOSHITA Hiroo ID: 9000000510040

    Articles in CiNii:4

    • Soft X-ray projection lithography (1993)
    • X線縮小リソグラフィ (1994)
    • X線縮小投影露光技術 (放射光応用技術<特集>) (1994)
  • KINOSHITA Hiroo ID: 9000000799938

    Next Generation Catalyst Research Institute, Co., Ltd. (1996 from CiNii)

    Articles in CiNii:1

    • Reaction Mechanism of NO Reduction by CH_4 over Rare Earth Oxides in Oxidizing Atmosphere (1996)
  • KINOSHITA Hiroo ID: 9000002885980

    日本電信電話(株)厚木電気通信研究所 (1985 from CiNii)

    Articles in CiNii:2

    • Study on Pattern Inspection Technique for Opaque Samples (1981)
    • Alignment Accuracy Evaluation of X-Ray Lithography System SR-1 (1985)
  • KINOSHITA Hiroo ID: 9000005555340

    Laboratory of Advanced Science and Technology for Industry, University of Hyogo (2005 from CiNii)

    Articles in CiNii:10

    • Novel Evaluation System for Extreme Ultraviolet Lithography Resist in NewSUBARU (2005)
    • Resist Outgassing by EUV Irradiation (2001)
    • Mitigation of Low Outgassing and Small Line Edge Roughness for EUVL Resist (2004)
  • KINOSHITA Hiroo ID: 9000005569783

    NTT LSI Laboratories (1995 from CiNii)

    Articles in CiNii:1

    • Evaluation of Large-Area Mo/Si Multilayer Soft X-Ray Mirrors Fabricated by RF Magnetron Sputtering (1995)
  • KINOSHITA Hiroo ID: 9000006466323

    Laboratory of Advanced Science and Technology for Industry, Himeji institute Technology (2002 from CiNii)

    Articles in CiNii:1

    • Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering (2002)
  • KINOSHITA Hiroo ID: 9000020688088

    Articles in CiNii:1

    • Air bearing guided high speed XY stage. (1986)
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