Search Results1-13 of  13

  • MAKINOUCHI Susumu ID: 9000002954622

    Articles in CiNii:5

    • Auto-Tuning of Wafer Servo System Using Neural Network (2000)
    • A study on gap measurement with scanning optical encoder: 2 dimensional measurement using laser interference scan and synchronous phase detection (2010)
    • New Stage System for Step-and-Repeatm Scanning Stepper (1995)
  • MAKINOUCHI Susumu ID: 9000003832623

    Development Management Department, Precision Equipment Company, Nikon Corporation (2003 from CiNii)

    Articles in CiNii:1

    • PW-06 VIBRATION ISOLATION SYSTEM FOR SEMI-CONDUCTOR LITHOGRAPH MACHINE (2003)
  • MAKINOUCHI Susumu ID: 9000014254625

    NIKON CORPORATION (2013 from CiNii)

    Articles in CiNii:2

    • 精密位置決めにおける共振と精度の関係 (1995)
    • Angular Acceleration Detection Method by Ultra-high Resolution Encoder with Hybrid Samping Time for Automotive Motor Application (2013)
  • MAKINOUCHI Susumu ID: 9000019967731

    株式会社ニコン (2009 from CiNii)

    Articles in CiNii:1

    • A Study on Control Structure for Slide Screw Stages:- Mechanical Nonlinearity and Control Optimization - (2009)
  • MAKINOUCHI Susumu ID: 9000019972048

    株式会社ニコン (2009 from CiNii)

    Articles in CiNii:1

    • A Study on Scanning Optical Encoder:-High Resolution Position Sensor Using Laser Interference Scan and Synchronous Phase Detection- (2009)
  • MAKINOUCHI Susumu ID: 9000019977537

    株式会社ニコン (2009 from CiNii)

    Articles in CiNii:1

    • A Study on Electromagnetic Damper Control for Ball Screw Stages:- Low Cost High Throughput Stage Using Ball Screw and Linear Motor Combination - (2009)
  • MAKINOUCHI Susumu ID: 9000019977620

    株式会社ニコン (2010 from CiNii)

    Articles in CiNii:1

    • A Study on Gap Measurement with Scanning Optical Encoder:—2 Dimensional Measurement Using Laser Interference Scan and Synchronous Phase Detection— (2010)
  • MAKINOUCHI Susumu ID: 9000020433046

    ニコン (2010 from CiNii)

    Articles in CiNii:1

    • Countermeasure of Exposure Machine for Earthquake:—Protection of Exposure Machine by means of Soft Landing— (2010)
  • MAKINOUCHI Susumu ID: 9000020652270

    Articles in CiNii:1

    • Special Issue on Ultra-precision Positioning Technologies. Sensor and Positioning in Semiconductor Lithography. (1991)
  • MAKINOUCHI Susumu ID: 9000022206383

    株式会社ニコン (2010 from CiNii)

    Articles in CiNii:1

    • A Study on Stabilization of Scanning Optical Encoder:—High Stability Position Sensor Using Synchronous Phase Detection and Compensation Grating— (2010)
  • Makinouchi Susumu ID: 9000258654687

    Bussiness Development Headquaters (2011 from CiNii)

    Articles in CiNii:1

    • A Study on Short-range Accuracy Measurement for Linear Encoder Scale (2011)
  • Makinouchi Susumu ID: 9000283801446

    Nikon (2008 from CiNii)

    Articles in CiNii:1

    • Reduction of Mechanical Vibration and Parameter Quantification for Nozzle-flapper Type Servo Valve (2008)
  • Makinouchi Susumu ID: 9000283801472

    Tokyo University of Agriculture and Technology (2008 from CiNii)

    Articles in CiNii:1

    • Control of Supplied Air Pressure Fluctuation for an Anti-vibration Apparatus (2008)
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