Search Results1-20 of  56

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  • Marumoto Kenji ID: 9000018934694

    Articles in CiNii:1

    • Theoretical Analysis on Mechanical Deformation of Membrane-Based Photomask Blanks (2012)
  • MARUMOTO KENJI ID: 9000253032577

    Advanced Technology R&D Center, Mitsubishi Electric Corp. (1996 from CiNii)

    Articles in CiNii:1

    • Performance of SR Lithography in Giga-bit DRAM Fabrication. (1996)
  • MARUMOTO Kenji ID: 9000000007874

    Articles in CiNii:2

    • A New Methodology of Optical Alignment of SR Lithography Beamline (1995)
    • 第二世代X線リソグラフィ (2002)
  • MARUMOTO Kenji ID: 9000003730376

    三菱電機(株)中央研究所 (1990 from CiNii)

    Articles in CiNii:3

    • Characterization of Solid Oxide Fuel Cell Components by Gas Permeability Measurement (1990)
    • An Optimization Method for Design of Solar Collector Systems of Horizontal Coaxial Cylinders (1983)
    • Heat and Mass Transfer Performances on Plate Fin and Tube Heat Exchangers under Dehumidification (1988)
  • MARUMOTO Kenji ID: 9000003806262

    Advanced Technology R&D Center, Mitsubishi Electric Corporation (2002 from CiNii)

    Articles in CiNii:11

    • Analysis of Overlay Accuracy in 0.14μm Device Fabrication using Synchrotron Radiation Lithography (1997)
    • Control of X-Ray Beam Fluctuation in Synchrotron Radiation Lithography Beamline (1995)
    • Influence of Optical Parameters of Synchrotron Radiation Lithhography Beamline on Pattern Replication (1996)
  • MARUMOTO Kenji ID: 9000005845219

    Advanced Technology R&D Center, Mitsubishi Electric Corporation (2000 from CiNii)

    Articles in CiNii:1

    • A New Cleaning Technique for X-Ray Masks in Alkaline Solutions by Direct Control of Electrochemical Potential (2000)
  • MARUMOTO Kenji ID: 9000107334575

    Super-fine SR Lithography Lab., Association of Super-Advanced Electronics Technologies (2001 from CiNii)

    Articles in CiNii:1

    • Defect Printability for 100 nm Patterns in X-Ray Lithography (2001)
  • MARUMOTO Kenji ID: 9000107374334

    Advanced Technology R&D Center, Mistubishi Electric Corporation (1998 from CiNii)

    Articles in CiNii:1

    • An Evaluation of High Acceleration Voltage Electron Beam Writing on X-Ray Masks (1998)
  • MARUMOTO Kenji ID: 9000241689969

    Mitsubishi Electric Corporation (1990 from CiNii)

    Articles in CiNii:1

    • A STUDY ON CONTROL OF THERMAL RADIATION ENVIRONMENT INSIDE A ROOM (1990)
  • MARUMOTO Kenji ID: 9000255761736

    Articles in CiNii:1

    • An Optimization Method for Design of Solar Collector Systems of Horizontal Coaxial Cylinders (1983)
  • MARUMOTO Kenji ID: 9000255763938

    Articles in CiNii:1

    • Characterization of solid oxide fuel cell components by gas permeability measurement. (1990)
  • MARUMOTO Kenji ID: 9000256226218

    Articles in CiNii:1

    • Heat and mass transfer performances on plate fin and tube heat exchangers under dehumidification. (1988)
  • MARUMOTO Kenji ID: 9000347104311

    Articles in CiNii:1

    • Theoretical and Experimental Study on Heat Transfer and Thermal Performance of Concentration Solar Collector of Horizontal Coaxial Cylinders (1982)
  • MARUMOTO Kenji ID: 9000391695396

    Articles in CiNii:1

    • Characterization of Solid Oxide Fuel Cell Components by Gas Permeability Measurement (1992)
  • Marumoto Kenji ID: 9000021142121

    Articles in CiNii:1

    • Theoretical and Experimental Study on Heat Transfer and Thermal Performance of Concentration Solar Collector of Horizontal Coaxial Cylinders (1982)
  • Marumoto Kenji ID: 9000252980596

    Central Research Laboratory, Mitsubishi Electric Corporation (1992 from CiNii)

    Articles in CiNii:1

    • X-Ray Mask Fabrication Process Using Cr Mask and ITO Stopper in the Dry Etching of W Absorber (1992)
  • Marumoto Kenji ID: 9000252980920

    Central Research Laboratory, Mitsubishi Electric Corporation (1992 from CiNii)

    Articles in CiNii:1

    • Sputtered W–Ti Film for X-Ray Mask Absorber (1992)
  • Marumoto Kenji ID: 9000252981048

    Central Research Laboratory, Mitsubishi Electric Corporation (1992 from CiNii)

    Articles in CiNii:1

    • Fabrication of Diamond Membranes for X-Ray Masks by Hot-Filament Method (1992)
  • Marumoto Kenji ID: 9000252985311

    Semiconductor Research Laboratory, Mitsubishi Electric Corporation (1993 from CiNii)

    Articles in CiNii:1

    • Fine Pattern Etching of W–Ti Absorber for X-Ray Mask with Electron Cyclotron Resonance Discharge Plasmas (1993)
  • Marumoto Kenji ID: 9000252988388

    Semiconductor Research Laboratory, Mitsubishi Electric Corp. (1993 from CiNii)

    Articles in CiNii:1

    • Improvement of Pattern and Position Accuracies by Multiple Electron Beam Writing for X-Ray Mask Fabrication (1993)
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