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  • MIZOKAMI Kazuaki ID: 9000005565289

    Precision Center, Hitachi Tokyo Electronics Co., Ltd. (1995 from CiNii)

    Articles in CiNii:3

    • A New Atmospheric Pressure Ionization Mass Spectrometer for the Analysis of Trace Gas Impurities in Silicon Source Gases used for Semiconductor Fabrication (1995)
    • Quantitative Analysis of Trace Water in Highly Puified Nitrogen Gas by Atmospheric Pressure Ionization Mass Spectrometer (1995)
    • Quantitative Analysis of Trace Water in Monosilane Gas Using Atmospheric-Pressure Ionization Mass Spectrometer with Bicompartment Ion Source (1995)
  • Mizokami Kazuaki ID: 9000258124541

    Precision Center, Hitachi Tokyo Electronics Co., Ltd., Kokubunji–shi, Tokyo 185, Japan (1995 from CiNii)

    Articles in CiNii:1

    • A New Atmospheric Pressure Ionization Mass Spectrometer for the Analysis of Trace Gas Impurities in Silicon Source Gases used for Semiconductor Fabrication. (1995)
  • Mizokami Kazuaki ID: 9000258129627

    EED, Hitachi Tokyo Electronics Co., Ltd., Kokubunji, Tokyo 185, Japan (1995 from CiNii)

    Articles in CiNii:1

    • Quantitative Analysis of Trace Water in Highly Purified Nitrogen Gas by Atmospheric Pressure Ionization Mass Spectrometer. (1995)
  • Mizokami Kazuaki ID: 9000401649719

    Articles in CiNii:1

    • A New Atmospheric Pressure Ionization Mass Spectrometer for the Analysis of Trace Gas Impurities in Silicon Source Gases used for Semiconductor Fabrication (1995)
  • Mizokami Kazuaki ID: 9000401652009

    Articles in CiNii:1

    • Quantitative Analysis of Trace Water in Monosilane Gas Using Atmospheric-Pressure Ionization Mass Spectrometer with Bicompartment Ion Source (1995)
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