Search Results1-20 of  29

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  • MORIYAMA Shigeo ID: 9000000066862

    Central Research Laboratory, Hitachi Ltd. (1996 from CiNii)

    Articles in CiNii:1

    • An End-point Detector for Planarization of Semiconductor Devices by Chemical Mechanical Polishing (1996)
  • MORIYAMA Shigeo ID: 9000001721436

    Central Research Laboratory, Hitachi Ltd. (1995 from CiNii)

    Articles in CiNii:1

    • Low Permittivity Organic Dielectrics for Multilevel Interconnection in High Speed ULSIs (1995)
  • MORIYAMA Shigeo ID: 9000002448923

    Articles in CiNii:1

    • Akinari as a Chajin (Teamaster) (1993)
  • MORIYAMA Shigeo ID: 9000002955063

    (株)日立製作所中央研究所 (1995 from CiNii)

    Articles in CiNii:1

    • End-point Detection for Planarization of Semiconductor Devices by Chemical Mechanical Polishing (1995)
  • MORIYAMA Shigeo ID: 9000002960710

    ものつくり大学 (2004 from CiNii)

    Articles in CiNii:5

    • 加工力の動的制御による非球面ミラーの研磨加工 (1996)
    • STI用固定砥粒CMP(FX-CMP)の開発(第3報):加工均一性の検討 (2002)
    • STI用固定砥粒CMP(FX-CMP)の開発 : 砥粒の選定 (2001)
  • MORIYAMA Shigeo ID: 9000020688934

    Articles in CiNii:1

    • Reflection coefficient correction technique for an optical fiber displacement sensor. (1987)
  • MORIYAMA Shigeo ID: 9000020786993

    Articles in CiNii:1

    • Fabrication of aspheric mirrors for a hard X-ray microprobe. (1991)
  • MORIYAMA Shigeo ID: 9000020792087

    Central Research Laboratory, Hitachi, Ltd. (1992 from CiNii)

    Articles in CiNii:1

    • Numerical Controlled Diamond Flycutting Machine for Grazing Incidence X-ray Reflection Mirrors. (1992)
  • MORIYAMA Shigeo ID: 9000020796277

    Articles in CiNii:1

    • One design procedure for precision positioning mechanisms. (1988)
  • MORIYAMA Shigeo ID: 9000252844269

    日立製作所中央研究所 (1975 from CiNii)

    Articles in CiNii:1

    • Mechanical Ruling of Stigmatic Concave Gratings (1975)
  • MORIYAMA Shigeo ID: 9000254269830

    正会員 (株) 日立製作所 (1983 from CiNii)

    Articles in CiNii:1

    • A Precision Displacement Measurement Using a Diffraction Grating (1983)
  • MORIYAMA Shigeo ID: 9000254270122

    正会員 (株)日立製作所 (1984 from CiNii)

    Articles in CiNii:1

    • Precision X-Y Stage with a Piezo-driven Fine-table (1984)
  • MORIYAMA Shigeo ID: 9000258289232

    (株)豊田中央研究所 (1988 from CiNii)

    Articles in CiNii:1

    • Vanadium Carbide Layers Formed on Cast Irons Immersed in Molten Borax Baths (1988)
  • MORIYAMA Shigeo ID: 9000365012518

    Articles in CiNii:1

    • 8-7 Chemical Fire Boat KAWASAKI MARU No.4 (1980)
  • Moriyama Shigeo ID: 9000014592145

    Articles in CiNii:6

    • 5.国鉄青函連絡船船型におけるサイド・スラスタ用開口部の形状が抵抗におよぼす影響 (1963)
    • 2.双胴船の抵抗試験について (1963)
    • 1.超大型船の系統的模型試験 (1963)
  • Moriyama Shigeo ID: 9000252985244

    Central Research Laboratory, Hitachi Ltd. (1993 from CiNii)

    Articles in CiNii:1

    • Overlay Error Estimation of Wafer Rear Surface Alignment for 0.1-μm Lithography (1993)
  • Moriyama Shigeo ID: 9000283806491

    Institute of Technologists (2003 from CiNii)

    Articles in CiNii:1

    • Precision XY-Positioning by a SCARA type Robot using a Friction Drive (2003)
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