Search Results1-20 of  30

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  • MUTOH Katsuhiko ID: 9000005547829

    Matsushita Research Institute Tokyou, Inc (1991 from CiNii)

    Articles in CiNii:2

    • Nanometer Pattern Transfer by VUV Lithography with a D_2 Lamp : Lithography Technology : (1991)
    • Study of Hydrogen Vacuum-Ultraviolet Light Sources for Submicron Lithography : Lithography Technology : (1991)
  • MUTOH Katsuhiko ID: 9000018565005

    Seki Technotron Corp. (2011 from CiNii)

    Articles in CiNii:1

    • Development of Hetero-Epitaxial Diamond Substrate and its Device Applications (2011)
  • MUTOH Katsuhiko ID: 9000020264406

    Matsushita Research Institute Tokyo, Inc. (1990 from CiNii)

    Articles in CiNii:1

    • Fabrication of W/C multilayers by excimer-laser-induced chemical vapor deposition. (1990)
  • MUTOH Katsuhiko ID: 9000253693797

    Matsushita Research Institute Tokyo, Inc. (1994 from CiNii)

    Articles in CiNii:1

    • Fabrication of Soft .CHI.-Ray Multilayer Mirrors by Excimer Laser-Induced Chemical Vapor Deposition. (1994)
  • Mutoh Katsuhiko ID: 9000252762330

    Opto-Electronics Research Laboratory, Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd. (1990 from CiNii)

    Articles in CiNii:1

    • Reactive Ion-Beam Etching of InP with Cl<SUB>2</SUB> (1990)
  • Mutoh Katsuhiko ID: 9000252765095

    Matsushita Research Institute Tokyo, Inc. (1992 from CiNii)

    Articles in CiNii:1

    • Absorption Coefficient and Sensitivity of Positive and Negative Resists in the Vacuum Ultraviolet Region (1992)
  • Mutoh Katsuhiko ID: 9000252765226

    Articles in CiNii:1

    • Magnetron Sputter-Deposited Al<SUB>2</SUB>O<SUB>3</SUB>/SiO<SUB>2</SUB> Multilayer Coatings for Kilowatt Excimer Lasers with High Repetition Rates (1992)
  • Mutoh Katsuhiko ID: 9000252765319

    Matsushita Research Institute Tokyo, Inc. (1992 from CiNii)

    Articles in CiNii:1

    • Thickness Control of Multilayer Films in Laser-Induced Chemical Vapor Deposition (1992)
  • Mutoh Katsuhiko ID: 9000252972324

    Matsushita Research Institute Tokyo, Inc. (1990 from CiNii)

    Articles in CiNii:1

    • Study of Hydrogen Vacuum-Ultraviolet Light Sources for Submicron Lithography (1990)
  • Mutoh Katsuhiko ID: 9000252972337

    Matsushita Research Institute Tokyo, Inc. (1990 from CiNii)

    Articles in CiNii:1

    • Nanometer Pattern Transfer by VUV Lithography with a D<SUB>2</SUB> Lamp (1990)
  • Mutoh Katsuhiko ID: 9000252975822

    Matsushita Research Institute Tokyo, Inc. (1991 from CiNii)

    Articles in CiNii:1

    • Simultaneous Fabrication of Vertical and 45° Mirrors of InP for Surface-Emitting Lasers Using Inclined Cl Ion Beams (1991)
  • Mutoh Katsuhiko ID: 9000252977543

    Matsushita Research Institute Tokyo, Inc. (1991 from CiNii)

    Articles in CiNii:1

    • Laser-Beam-Scanning Chemical Vapor Deposition Technique for Controlling the Spatial Thickness Distribution of Thin Films (1991)
  • Mutoh Katsuhiko ID: 9000252981823

    Matsushita Research Institute Tokyo, Inc. (1992 from CiNii)

    Articles in CiNii:1

    • Fabrication of Tungsten-Carbon Multilayers for Soft X-Ray Optics Using Excimer-Laser-Induced Chemical Vapor Deposition Technique (1992)
  • Mutoh Katsuhiko ID: 9000392714809

    Articles in CiNii:1

    • Nanometer Pattern Transfer by VUV Lithography with a D<SUB>2</SUB> Lamp (1990)
  • Mutoh Katsuhiko ID: 9000392714855

    Articles in CiNii:1

    • Study of Hydrogen Vacuum-Ultraviolet Light Sources for Submicron Lithography (1990)
  • Mutoh Katsuhiko ID: 9000392714937

    Articles in CiNii:1

    • Absorption Coefficient and Sensitivity of Positive and Negative Resists in the Vacuum Ultraviolet Region (1992)
  • Mutoh Katsuhiko ID: 9000392716176

    Articles in CiNii:1

    • Simultaneous Fabrication of Vertical and 45° Mirrors of InP for Surface-Emitting Lasers Using Inclined Cl Ion Beams (1991)
  • Mutoh Katsuhiko ID: 9000392716855

    Articles in CiNii:1

    • Reactive Ion-Beam Etching of InP with Cl<SUB>2</SUB> (1990)
  • Mutoh Katsuhiko ID: 9000392721310

    Articles in CiNii:1

    • Fabrication of Tungsten-Carbon Multilayers for Soft X-Ray Optics Using Excimer-Laser-Induced Chemical Vapor Deposition Technique (1992)
  • Mutoh Katsuhiko ID: 9000392727123

    Articles in CiNii:1

    • Laser-Beam-Scanning Chemical Vapor Deposition Technique for Controlling the Spatial Thickness Distribution of Thin Films (1991)
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