Search Results1-11 of  11

  • Makimoto Natsumi ID: 9000241752117

    Articles in CiNii:1

    • Effects of Bipolar Pulse Poling on the Ferroelectric and Piezoelectric Properties of Tetragonal Composition Pb(Zr₀.₃,Ti₀.₇)O₃ Thin Films on Microelectromechanical Systems Microcantilevers (Special Issue : Ferroelectric Materials and Their Applications) (2013)
  • Makimoto Natsumi ID: 9000271152199

    Articles in CiNii:1

    • Ultrafast poling to PZT thin films for piezoelectric MEMS (第6回 集積化MEMSシンポジウム) (2014)
  • Makimoto Natsumi ID: 9000308048173

    Articles in CiNii:6

    • ヘテロ集積化圧電MEMSデバイスの量産試作 (特集 マイクロシステム融合研究開発) (2013)
    • Pb(Zr₀.₃,Ti₀.₇)O₃及びPb(Zr₀.₅₂,Ti₀.₄₈)O₃薄膜を用いた圧電MEMS振動型エネルギーハーベスタ (第5回 集積化MEMSシンポジウム) (2013)
    • Ultrathin MEMS mirror device bonded on flexible substrate (2017)
  • Makimoto Natsumi ID: 9000345277694

    National Institute of Advanced Industrial Science and Technology (2016 from CiNii)

    Articles in CiNii:1

    • The piezoelectric MEMS process monitor as an index of the piezoelectric properties of the AlN thin films (2016)
  • Makimoto Natsumi ID: 9000347175254

    National Institute of Advanced Industrial Science and Technology (2014 from CiNii)

    Articles in CiNii:1

    • The Fabrication Technology for PZT Thin Film Devices on 200 mm wafers (2014)
  • Makimoto Natsumi ID: 9000347206672

    Ubiquitous MEMS and Micro Engineering Research Center (2015 from CiNii)

    Articles in CiNii:1

    • 圧電MEMS振動発電デバイスと鹿威し回路を用いた振動モニタリングシステムの開発 (2015)
  • Makimoto Natsumi ID: 9000402017718

    Articles in CiNii:1

    • Effects of Bipolar Pulse Poling on the Ferroelectric and Piezoelectric Properties of Tetragonal Composition Pb(Zr0.3,Ti0.7)O3Thin Films on Microelectromechanical Systems Microcantilevers (2013)
  • Makimoto Natsumi ID: 9000402037138

    Articles in CiNii:1

    • Design of piezoelectric MEMS cantilever for low-frequency vibration energy harvester (2016)
  • Makimoto Natsumi ID: 9000402039215

    Articles in CiNii:1

    • Simulation of an ultralow-power power management circuit for MEMS cantilever piezoelectric vibration energy harvesters (2016)
  • Makimoto Natsumi ID: 9000402039237

    Articles in CiNii:1

    • Simulation and fabrication of a MEMS optical scanner device considering deformation caused by internal stress (2016)
  • Makimoto Natsumi ID: 9000402045304

    Articles in CiNii:1

    • Fabrication of an ultrathin lead zirconate titanate mirror device mounted on flexible substrate (2017)
Page Top