Search Results1-20 of  104

  • Matsui Yasuji ID: 9000009565353

    Articles in CiNii:1

    • Advances in X-ray Lithography at ASET (2000)
  • MATSUI Yasuji ID: 9000000441578

    Association of Super-Advanced Electronics Technologies (ASET) (2001 from CiNii)

    Articles in CiNii:2

    • Advances in Proximity X-ray Lithography (2001)
    • X線露光装置 (超LSI製造・試験装置ガイドブック 2000年版) -- (製造装置編) (1999)
  • MATSUI Yasuji ID: 9000001655255

    Mitsubishi Electric Corporation, ULSI Laboratory (1996 from CiNii)

    Articles in CiNii:1

    • Highly Reliable Gate Oxides Formed by UV-O_2 Oxidation (1996)
  • MATSUI Yasuji ID: 9000003730378

    三菱電機(株)中央研究所 (1990 from CiNii)

    Articles in CiNii:1

    • Characterization of Solid Oxide Fuel Cell Components by Gas Permeability Measurement (1990)
  • MATSUI Yasuji ID: 9000003806265

    o NTT LSI Laboratories (1999 from CiNii)

    Articles in CiNii:3

    • Proximity Effect Correction for 1:1 X-Ray Mask Fabrication (1994)
    • Electron Beam Writing Techniques for Fabricating Highly Accurate X-Ray Masks (1995)
    • Studies on Defect Inspectabilty and Printability Using Programmed-Defect X-Ray Mask (1999)
  • MATSUI Yasuji ID: 9000004966784

    Mitsubishi Electric Corporation ULSI Laboratory (1997 from CiNii)

    Articles in CiNii:4

    • Shallow p^+n Junction Formation by Nitrogen Pre-Ion Implantation (1995)
    • Lithography. (1997)
    • Proposal of Next Generation Super Resolution Technique (1995)
  • MATSUI Yasuji ID: 9000004968883

    Association of Super-Advanced Electronics Technologies, ASET (2000 from CiNii)

    Articles in CiNii:3

    • "Device Applicability" Program of Proximity X-ray Lithography (2000)
    • Present Status of X-ray Proximity Lithography at the ASET Atsugi Research Center (1998)
    • X-ray mask delineation performances by advanced EB writer EB-X3 (2000)
  • MATSUI Yasuji ID: 9000005578916

    ULSI Laboratory, Mitsubishi Electric Corporation (1996 from CiNii)

    Articles in CiNii:1

    • Electron Beam Direct Writing Techniques for the Development of Sub-Quarter-Micron Devices (1996)
  • MATSUI Yasuji ID: 9000005596888

    ULSI laboratory, Mitsubishi Electric Corporation:Advanced Technology R&D Center (1999 from CiNii)

    Articles in CiNii:1

    • Improvement of Dry Etching Resistance of Resists by Deep UVCure (1999)
  • MATSUI Yasuji ID: 9000005715888

    Semiconductor Research Laboratory, Mitsubishi Electric Corporation (1994 from CiNii)

    Articles in CiNii:1

    • Effect of Electron Beam Orbit Distortion on Optical Performance of the Synchrotron Radiation Lithography Beamline (1994)
  • MATSUI Yasuji ID: 9000020156361

    Central Research Laboratory, Mitsubishi Electric Corp. (1988 from CiNii)

    Articles in CiNii:1

    • On homogeneous and heterogeneous reactions in plasma processing. (1988)
  • MATSUI Yasuji ID: 9000107334466

    Super-fine SR Lithography Lab., Association of Super-Advanced Electronics Technologies (ASET) (2001 from CiNii)

    Articles in CiNii:1

    • Capability of 70nm Pattern Replication in X-Ray Lithography (2001)
  • MATSUI Yasuji ID: 9000107334576

    Super-fine SR Lithography Lab., Association of Super-Advanced Electronics Technologies (2001 from CiNii)

    Articles in CiNii:1

    • Defect Printability for 100 nm Patterns in X-Ray Lithography (2001)
  • MATSUI Yasuji ID: 9000252924536

    Central Laboratory, Mitsubishi Electric Co. (1989 from CiNii)

    Articles in CiNii:1

    • LIF study on the spatial distributions and transport processes of radicals in hydrocarbon plasmas. (1989)
  • MATSUI Yasuji ID: 9000253326670

    Mitsubishi Electric Corporation ULSI Laboratory|Mitsubishi Electric Corporation Advanced Technology R & D Center (1997 from CiNii)

    Articles in CiNii:1

    • Lithography (1997)
  • MATSUI Yasuji ID: 9000255763940

    Articles in CiNii:1

    • Characterization of solid oxide fuel cell components by gas permeability measurement. (1990)
  • MATSUI Yasuji ID: 9000317564053

    Dept. of Office Management, Toyota Kosei Hospital (2016 from CiNii)

    Articles in CiNii:1

    • Our Commitment to Hire Handicapped People in Pursuance of Employment Promotion of Persons with Disabilities Law (2016)
  • MATSUI Yasuji ID: 9000391695398

    Articles in CiNii:1

    • Characterization of Solid Oxide Fuel Cell Components by Gas Permeability Measurement (1992)
  • Matsui Yasuji ID: 9000003739253

    Articles in CiNii:4

    • 予混合炎の速度論的解析 (1976)
    • 新しい灯油気化式燃焼機--Air Jet Burner (1979)
    • 新形ガスファンヒ-タ- (1982)
  • Matsui Yasuji ID: 9000020281365

    Semiconductor Research Laboratory, Mitsubishi Electric Corporation (1994 from CiNii)

    Articles in CiNii:1

    • Reaction Analysis and Apparatus Development of TEOS/O3 Atmospheric Pressure CVD. (1994)
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