Search Results1-20 of  21

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  • NAKAO Shuji ID: 9000003303787

    Department of Physics,Faculty of Science,Kyoto University (1984 from CiNii)

    Articles in CiNii:1

    • Toroidal Plasma Current Start-Up and Sustainment by rf in the WT-2 Toroidal Device (1984)
  • NAKAO Shuji ID: 9000004754850

    ULSI Development Center, Mitsubishi Electric Corp., (2001 from CiNii)

    Articles in CiNii:2

    • Current Status of KrF Excimer Laser Lithography (2001)
    • Simple Method for Resist CD Prediction (1998)
  • NAKAO Shuji ID: 9000004966783

    Articles in CiNii:2

    • KrFエキシマ転写技術 (特集"半導体") -- (基盤技術) (1997)
    • Optical Proximity Correction based on Aerial Image Simulation (1995)
  • NAKAO Shuji ID: 9000005551346

    National Industrial Research Institute of Nagoya (2000 from CiNii)

    Articles in CiNii:18

    • Effect of High-Energy Carbon Ion Irradiation in Aligned and Random Directions on Microstructure of (111) Au Films (1994)
    • Electron Beam Direct Writing Techniques for the Development of Sub-Quarter-Micron Devices (1996)
    • Measurement of Spherical Aberration Utilizing an Alternating Phase Shift Mask (1998)
  • Nakao Shuji ID: 9000252980987

    LSI Laboratory, Mitsubishi Electric Corporation (1992 from CiNii)

    Articles in CiNii:1

    • Novel Electron Beam Direct Writing Technique for the Hole Pattern of Quarter-Micron Devices (1992)
  • Nakao Shuji ID: 9000254134325

    Department of Physics, Faculty of Science, Kyoto University (1984 from CiNii)

    Articles in CiNii:1

    • Toroidal Plasma Current Start-Up and Sustainment by rf in the WT-2 Toroidal Device (1984)
  • Nakao Shuji ID: 9000258138975

    ULSI Development Center, Mitsubishi Electric Corporation, 4–1 Mizuhara, Itami, Hyogo 664–8641, Japan (1998 from CiNii)

    Articles in CiNii:1

    • Measurement of Spherical Aberration Utilizing an Alternating Phase Shift Mask. (1998)
  • Nakao Shuji ID: 9000258146552

    ULSI Development Center, Mitsubishi Electric Corporation, 4–1 Mizuhara, Itami, Hyogo 664–8641, Japan (1999 from CiNii)

    Articles in CiNii:1

    • Impact of Spherical Aberrations on Priniting Characteristics of Irregularly Aligned Patterns of Alternating Phase Shift Mask. (1999)
  • Nakao Shuji ID: 9000283685269

    Faculty of Medicine, Kyushu University (1991 from CiNii)

    Articles in CiNii:1

    • Rapid chemo-sensitivity testing for anticancer durgs using contact-sensitive monolayers of Balb/3T3 cells (cell mat), First Department of Internal Medicine. (1991)
  • Nakao Shuji ID: 9000392717107

    Articles in CiNii:1

    • Novel Electron Beam Direct Writing Technique for the Hole Pattern of Quarter-Micron Devices (1992)
  • Nakao Shuji ID: 9000401630007

    Articles in CiNii:1

    • Novel Electron Beam Direct Writing Technique for the Hole Pattern of Quarter-Micron Devices (1992)
  • Nakao Shuji ID: 9000401659657

    Articles in CiNii:1

    • Electron Beam Direct Writing Techniques for the Development of Sub-Quarter-Micron Devices (1996)
  • Nakao Shuji ID: 9000401659707

    Articles in CiNii:1

    • Precision Improvement in Optical Proximity Correction by Optimizing Second Illumination Source Shape (1996)
  • Nakao Shuji ID: 9000401675037

    Articles in CiNii:1

    • Measurement of Spherical Aberration Utilizing an Alternating Phase Shift Mask (1998)
  • Nakao Shuji ID: 9000401675682

    Articles in CiNii:1

    • Quantitative Measurement of the Ray Shift Aspect of Coma Aberration Utilizing Electrical Probe with Zero-Crossing Method (1998)
  • Nakao Shuji ID: 9000401675688

    Articles in CiNii:1

    • Measurement Method for Odd Component of Aberration Function Utilizing Alternating Phase Shift Mask (1998)
  • Nakao Shuji ID: 9000401675839

    Articles in CiNii:1

    • Simple Method for Resist Critical Dimension Prediction (1998)
  • Nakao Shuji ID: 9000401679508

    Articles in CiNii:1

    • Impact of Spherical Aberrations on Printing Characteristics of Irregularly Aligned Patterns of Alternating Phase Shift Mask (1999)
  • Nakao Shuji ID: 9000401680357

    Articles in CiNii:1

    • 1999-05-15 (1999)
  • Nakao Shuji ID: 9000401684490

    Articles in CiNii:1

    • 1999-12-30 (1999)
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