Search Results1-20 of  24

  • 1 / 2
  • OGASAWARA Munehiro ID: 9000004754864

    Corporate Research and Development Center, Toshiba Corporation (2001 from CiNii)

    Articles in CiNii:2

    • Present Status and Future Development Issues of Electron Beam Mask Writers (2001)
    • The Effect of Down-Flow Cleaning Process on Materials Used in an EB System (1997)
  • OGASAWARA Munehiro ID: 9000005544591

    Advanced LSI Laboratory, Corporate R&D Center, Toshiba Corporation (2002 from CiNii)

    Articles in CiNii:8

    • Recovery of SEM Image by In-Situ Cleaning of Contaminated Objective Aperture (1996)
    • The Effect of Down-Flow Cleaning Process on Materials Used in an Electron Beam System (1997)
    • Reduction of Electron Beam Drift Caused by Deflecting Electrode by Downflow Cleaning Process (1995)
  • OGASAWARA Munehiro ID: 9000005605345

    Advanced Semiconductor Devices Research Laboratories, Research and Development Center, Toshiba Corporation (1999 from CiNii)

    Articles in CiNii:1

    • Automatic Focusing and Astigmatism Correction Method based on Fourier Transform of Scanning Electron Microscope Images (1999)
  • OGASAWARA Munehiro ID: 9000107350006

    ASET EUV Kawasaki Branch Laboratory (2004 from CiNii)

    Articles in CiNii:1

    • Evaluation of Mask Soaking Performance in a Thermally Stabilized Vacuum Chamber in an Electron Beam Mask Writer (2004)
  • Ogasawara Munehiro ID: 9000252759647

    Articles in CiNii:1

    • Filling a Double-Cusp Magnetic Container with Plasmas Produced by a Long-Pulse CO<SUB>2</SUB>-Laser and Its Confinement Properties (1987)
  • Ogasawara Munehiro ID: 9000252952806

    Department of Physics, University of Tokyo (1983 from CiNii)

    Articles in CiNii:1

    • Experimental Studies on Laser-Produced-Plasma-Initiated Reflex-Triode-Type Pulsed Ion-Beam Generator (1983)
  • Ogasawara Munehiro ID: 9000252958115

    Department of Physics, University of Tokyo (1986 from CiNii)

    Articles in CiNii:1

    • Behavior of Plasma Produced by a Long CO<SUB>2</SUB>-Laser Pulse in a Spindle-Cusp (1986)
  • Ogasawara Munehiro ID: 9000252981010

    Articles in CiNii:1

    • Focused Ion Beam Assisted Etching of Quartz in XeF<SUB>2</SUB> without Transmittance Reduction for Phase Shifting Mask Repair (1992)
  • Ogasawara Munehiro ID: 9000258124997

    Toshiba Research and Development Center, 1, Komukai Toshiba–cho, Saiwai–ku, Kawasaki–shi 210, Japan (1995 from CiNii)

    Articles in CiNii:1

    • Reduction of Electron Beam Drift Caused by Deflecting Electrode by Downflow Cleaning Process. (1995)
  • Ogasawara Munehiro ID: 9000258134499

    R&D Center, Toshiba Corp., 1, Komukai Toshiba–cho, Saiwai–ku, Kawasaki 210, Japan (1997 from CiNii)

    Articles in CiNii:1

    • The Effect of Down-Flow Cleaning Process on Materials Used in an Electron Beam System. (1997)
  • Ogasawara Munehiro ID: 9000258145547

    Advanced Semiconductor Devices Research Laboratories, Research and Development Center, Toshiba Corporation, 1, Komukai Toshiba–cho, Saiwai–ku, Kawasaki 210–8582, Japan (1999 from CiNii)

    Articles in CiNii:1

    • Automatic Focusing and Astigmatism Correction Method based on Fourier Transform of Scanning Electron Microscope Images. (1999)
  • Ogasawara Munehiro ID: 9000258174074

    ASET EUV Kawasaki Branch Laboratory (2004 from CiNii)

    Articles in CiNii:1

    • Evaluation of Mask Soaking Performance in a Thermally Stabilized Vacuum Chamber in an Electron Beam Mask Writer (2004)
  • Ogasawara Munehiro ID: 9000392694505

    Articles in CiNii:1

    • Experimental Studies on Laser-Produced-Plasma-Initiated Reflex-Triode-Type Pulsed Ion-Beam Generator (1983)
  • Ogasawara Munehiro ID: 9000392706133

    Articles in CiNii:1

    • Behavior of Plasma Produced by a Long CO<SUB>2</SUB>-Laser Pulse in a Spindle-Cusp (1986)
  • Ogasawara Munehiro ID: 9000401593122

    Articles in CiNii:1

    • Experimental Studies on Laser-Produced-Plasma-Initiated Reflex-Triode-Type Pulsed Ion-Beam Generator (1983)
  • Ogasawara Munehiro ID: 9000401600040

    Articles in CiNii:1

    • Behavior of Plasma Produced by a Long CO2-Laser Pulse in a Spindle-Cusp (1986)
  • Ogasawara Munehiro ID: 9000401601729

    Articles in CiNii:1

    • Filling a Double-Cusp Magnetic Container with Plasmas Produced by a Long-Pulse CO2-Laser and Its Confinement Properties (1987)
  • Ogasawara Munehiro ID: 9000401630184

    Articles in CiNii:1

    • Focused Ion Beam Assisted Etching of Quartz in XeF2without Transmittance Reduction for Phase Shifting Mask Repair (1992)
  • Ogasawara Munehiro ID: 9000401652289

    Articles in CiNii:1

    • Reduction of Electron Beam Drift Caused by Deflecting Electrode by Downflow Cleaning Process (1995)
  • Ogasawara Munehiro ID: 9000401657740

    Articles in CiNii:1

    • Recovery of SEM Image byIn-Situ Cleaning of Contaminated Objective Aperture (1996)
  • 1 / 2
Page Top