Search Results1-20 of  52

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  • SAITOU Norio ID: 9000000066894

    Central Research Lab., Hitachi, Ltd. (1996 from CiNii)

    Articles in CiNii:1

    • Electron Beam Lithography-Present and Future (1996)
  • SAITOU Norio ID: 9000001655478

    Central Research Laboratory, Hitachi, Ltd. (1998 from CiNii)

    Articles in CiNii:1

    • The present and future issues in e-beam direct writing technology (1998)
  • SAITOU Norio ID: 9000002956758

    Hitachi High-Technologies Corp. (2005 from CiNii)

    Articles in CiNii:5

    • Hitachi High-Technologies Corporation / Hitachi, Ltd., Central Research Laboratory (2004)
    • Moving Model of an Artificial Earthwarm type Mobile Inspection Robot for Small-diameter and Long Pipes (2003)
    • Moving Characteristic of In-pipe Mobile Robot Driven by Pneumatic Actuator for 3 Inch Diameter Pipes (2002)
  • SAITOU Norio ID: 9000002961695

    日立製作所中央研究所 (2001 from CiNii)

    Articles in CiNii:2

    • Metrological Technologies Using Laser in Semiconductor Lithography (1998)
    • E-beam Lithography System for Pattern Generation (2001)
  • SAITOU Norio ID: 9000004872333

    Central Research Laboratory, Hitachi, Ltd. (1997 from CiNii)

    Articles in CiNii:5

    • High Speed Electron Beam Cell Projection Exposure System (Special Issue on Quarter Micron Si Device and Process Technologies) (1994)
    • EB call projection Lithography : Lithography Technology : (1991)
    • Cell Projection Lithography with Scattering Contrast (1994)
  • SAITOU Norio ID: 9000005522814

    Central Research Laboratory, Hitachi, Ltd. (1971 from CiNii)

    Articles in CiNii:2

    • Phase-Hologram Fabrication with a Computer-Controlled Electron Beam (1971)
    • Fine Chromium Grating Directly Made by Irradiating Electron Beam (1971)
  • SAITOU Norio ID: 9000005733646

    Central Research Laboratory, Hitachi Ltd. (1995 from CiNii)

    Articles in CiNii:1

    • Active Vibration Correction in Electron Beam Lithography System (1995)
  • SAITOU Norio ID: 9000006462936

    Central Research Laboratory Hitachi, Ltd. (2002 from CiNii)

    Articles in CiNii:1

    • Design and Evaluation of an Electron Objective Lens System with Two Lenses and Two Deflectors (2002)
  • SAITOU Norio ID: 9000014078127

    多摩緑成会病院整形外科 (2006 from CiNii)

    Articles in CiNii:1

    • Surface replacement arthroplasty and collateral ligament reconstruction to the proximal interphalangeal joint with old dislocation of the little finger : A case report (2006)
  • SAITOU Norio ID: 9000021428691

    Central Research Laboratory, Hitachi Ltd. (1978 from CiNii)

    Articles in CiNii:1

    • Power Spectral Density of Field Emission Current Fluctuation (1978)
  • SAITOU Norio ID: 9000107320991

    Central Research Laboratory, Hitachi. Ltd. (2003 from CiNii)

    Articles in CiNii:1

    • Preparatory Study for the Matrix-Pattern Imaging, BE System (2003)
  • Saitou Norio ID: 9000252755033

    Central Research Laboratory, Hitachi, Ltd. (1971 from CiNii)

    Articles in CiNii:1

    • Analysis of Trapezoid Distortion due to Charge-Up in Electron Beam Recording (1971)
  • Saitou Norio ID: 9000252937861

    Central Research Laboratory, Hitachi, Ltd. (1971 from CiNii)

    Articles in CiNii:1

    • Mask Fabrication with Submicron Line-Width by Electron Beam (1971)
  • Saitou Norio ID: 9000252938064

    Central Research Laboratory, Hitachi Ltd. (1971 from CiNii)

    Articles in CiNii:1

    • Phase-Hologram Fabrication with a Computer-Controlled Electron Beam (1971)
  • Saitou Norio ID: 9000252938427

    Central Research Laboratory, Hitachi Ltd. (1971 from CiNii)

    Articles in CiNii:1

    • Fine Chromium Grating Directly Made by Irradiating Electron Beam (1971)
  • Saitou Norio ID: 9000252939352

    Central Research Laboratory, Hitachi, Ltd. (1972 from CiNii)

    Articles in CiNii:1

    • Change of Apparent Sensitivity of an Electron Resist Due to Backing Materials (1972)
  • Saitou Norio ID: 9000252940165

    Central Research Laboratory, Hitachi, Ltd. (1973 from CiNii)

    Articles in CiNii:1

    • Monte Carlo Simulation for the Energy Dissipation Profiles of 5–20 keV Electrons in Layered Structures (1973)
  • Saitou Norio ID: 9000252950779

    Central Research Laboratory, Hitachi Ltd. (1982 from CiNii)

    Articles in CiNii:1

    • Role of Ion Bombardment in Field Emission Current Instability (1982)
  • Saitou Norio ID: 9000252980769

    Central Research Laboratory, Hitachi Ltd. (1992 from CiNii)

    Articles in CiNii:1

    • Thermal Characteristics of Si Mask for EB Cell Projection Lithography (1992)
  • Saitou Norio ID: 9000252980799

    Central Research Laboratory, Hitachi, Ltd. (1992 from CiNii)

    Articles in CiNii:1

    • Error Analysis in Electron Beam Lithography System —Thermal Effects on Positioning Accuracy— (1992)
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