Search Results1-20 of  115

  • SHINGUBARA Shoso ID: 9000000227123

    Department of Electrical Engineering Hiroshima University (1996 from CiNii)

    Articles in CiNii:1

    • High-Rate Bias Sputtering Filling of SiO_2 Film Employing Both Continuous Wave and Time-Modulated Inductively Coupled Plasmas (1996)
  • SHINGUBARA Shoso ID: 9000001995112

    Faculty of System Engineering and Science, Kansai University (2007 from CiNii)

    Articles in CiNii:2

    • Bottom-up Fill of Cu in Ultra-fine Holes by Electroless Plating (2007)
    • Fabrication of ultra high density magnetic recording media using self-organized nanohole array (2007)
  • SHINGUBARA Shoso ID: 9000002115209

    Kansai University (2008 from CiNii)

    Articles in CiNii:1

    • Development of MEMS Capacitive Sensor Using a MOSFET Structure (2008)
  • SHINGUBARA Shoso ID: 9000003303773

    Department of Applied Physics,Tokyo Institute of Technology:VLSI Research Center,Toshiba Corporation (1988 from CiNii)

    Articles in CiNii:1

    • Vortices around a Sinkhole--Phase Diagram for One-Celled and Two-Celled Vortices (1988)
  • SHINGUBARA Shoso ID: 9000006697206

    関西大 (2010 from CiNii)

    Articles in CiNii:5

    • Silicon technology (2010)
    • 414 Measurement of intensity distribution of underwater ultrasonic wave by holographic ineterferometry (2006)
    • S1302-1-6 Fabrication of the high efficiency large-size diffraction optical elements using direct laser write lithography system (2009)
  • SHINGUBARA Shoso ID: 9000107306184

    Graduate School of Advanced Science of Matter, Hiroshima University (2003 from CiNii)

    Articles in CiNii:1

    • Influence of Surface Oxide of Sputtered TaN on Displacement Plating of Cu (2003)
  • SHINGUBARA Shoso ID: 9000107307416

    Graduate School of Advanced Sciences of Matter, Hiroshima University (2003 from CiNii)

    Articles in CiNii:1

    • Thickness Dependences of Nucleation and Annihilation Fields of Magnetic Vortices in Submicron Supermalloy Dots (2003)
  • SHINGUBARA Shoso ID: 9000107341642

    Graduate School of Advanced Sciences of Matter, Hiroshima University (2005 from CiNii)

    Articles in CiNii:1

    • Contact Resistance Reduction Using Vacuum Loadlock System and Plasma Dry Cleaning (2005)
  • SHINGUBARA Shoso ID: 9000107347162

    Graduate School of Advanced Science of Matter, Hiroshima University (2004 from CiNii)

    Articles in CiNii:1

    • Effect of Additives on Hole Filling Characteristics of Electroless Copper Plating (2004)
  • SHINGUBARA Shoso ID: 9000107348733

    Graduate School of Advanced Science of Matter, Hiroshima University (2003 from CiNii)

    Articles in CiNii:1

    • Computer-Aided Chemistry Estimation Method of Electronic-Polarization Dielectric Constants for the Molecular Design of Low-k Materials (2003)
  • SHINGUBARA Shoso ID: 9000107352887

    Graduate School of Advanced Sciences of Matter, Hiroshima University (2005 from CiNii)

    Articles in CiNii:1

    • Epitaxial Silicon Growth by Load-Lock Low Pressure Chemical Vapor Deposition System for Elevated Source/Drain Formation (2005)
  • SHINGUBARA Shoso ID: 9000107355794

    Department of Electrical Engineering, Hiroshima University (1997 from CiNii)

    Articles in CiNii:1

    • A Model for Resolution Dependent Roughness Values Measured by an Optical Profiler for Specific Surfaces (1997)
  • SHINGUBARA Shoso ID: 9000107382987

    Dept.of Electrical Engineering, Hiroshima University (1996 from CiNii)

    Articles in CiNii:1

    • Aluminum-Selective Chemical Vapor Deposition Induced by Hydrogen Desorption on Silicon (1996)
  • SHINGUBARA Shoso ID: 9000107383422

    Hiroshima University, Department of Electrical Engineering (1996 from CiNii)

    Articles in CiNii:1

    • Fabrication of a Si Nanometer Column PN Junction and Implanted Defect Evaluation by Transmission Electron Microscopy (1996)
  • SHINGUBARA Shoso ID: 9000107391601

    Graduate School of Advanced Science of Matter, Hiroshima University (2003 from CiNii)

    Articles in CiNii:1

    • Highly Adhesive Electroless Cu Layer Formation Using an Ultra Thin Ionized Cluster Beam (ICB)-Pd Catalytic Layer for Sub-100 nm Cu Interconnections (2003)
  • SHINGUBARA Shoso ID: 9000242654405

    Kansai Univ (2011 from CiNii)

    Articles in CiNii:1

    • 514 Laser Marking to Thin Metal Film in Recording Medium (2011)
  • SHINGUBARA Shoso ID: 9000258092858

    関西大学システム理工学部機械工学科 (2014 from CiNii)

    Articles in CiNii:1

    • Formation of Vertical Epitaxial Si Nanowires on Si Using Self-organized Nanohole Array of Anodic Porous Alumina Template (2014)
  • SHINGUBARA Shoso ID: 9000283233305

    関西大学システム理工学部 (2014 from CiNii)

    Articles in CiNii:1

    • 電子材料委員会の活動の展望 (2014)
  • SHINGUBARA Shoso ID: 9000346990683

    Articles in CiNii:1

    • Oxidation of CuSn alloy nanotree and application for gas sensors (2016)
  • Shingubara Shoso ID: 9000252764053

    Department of Electrical Engineering, HIroshima Universiry (1991 from CiNii)

    Articles in CiNii:1

    • Sputtering of Aluminum Film Using Microwave Plasma with High Magnetic Field (1991)
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