Search Results1-17 of  17

  • Shiokawa Yoshiro ID: 9000010333259

    Articles in CiNii:1

    • Analysis of unstable species in cyclo-C4F8 plasma by ion attachment mass spectrometry (2007)
  • SHIOKAWA Yoshiro ID: 9000000007710

    Joint Research Center for Atom Technology (2000 from CiNii)

    Articles in CiNii:7

    • Pumping Speed Characteristics of Pumps by Conductance Modulation Method (1995)
    • Development of Vibration-free Cryo-Pump (1995)
    • The Study of Oxygen-doping Mechanisms in ITO Sputtering using the Quantitative Analysis Method (1997)
  • SHIOKAWA Yoshiro ID: 9000002034831

    キヤノンアネルバテクニクス(株)技術開発本部質量分析技術・開発グループ (2007 from CiNii)

    Articles in CiNii:1

    • Development of Ion Ataachment Mass Spectrometry (IAMS) (2007)
  • SHIOKAWA Yoshiro ID: 9000004506454

    Articles in CiNii:10

    • Development of non-Cracking Ion Attachment Mass Spectrometer (2001)
    • All Components Analysis in the Exhaust Gas from Dry-Etching Machine by Ion Attachment Mass Spectrometry (2001)
    • In-Situ Analysis of Perfluoro Compounds in Semiconductor Process Exhaust by Ion Attachment Mass Spectrometry(IAMS) (2002)
  • SHIOKAWA Yoshiro ID: 9000020060392

    ANELVA Corp. (1988 from CiNii)

    Articles in CiNii:1

    • Report of VAMAS-SCA-WG in Japan. (1988)
  • SHIOKAWA Yoshiro ID: 9000020103426

    ANELVA CORPORATION (2001 from CiNii)

    Articles in CiNii:1

    • サマリー・アブストラクト (2001)
  • SHIOKAWA Yoshiro ID: 9000020155520

    ANELVA CORPORATION (1988 from CiNii)

    Articles in CiNii:1

    • Development of micro AUGER/SIMS analysis system. I. (1988)
  • SHIOKAWA Yoshiro ID: 9000020231511

    ANELVA CORPORATION (1988 from CiNii)

    Articles in CiNii:1

    • Development of micro AUGER/SIMS analysis system. II. (1988)
  • SHIOKAWA Yoshiro ID: 9000020322013

    Joint Research Center for Atom Technology (2000 from CiNii)

    Articles in CiNii:1

    • サマリー・アブストラクト (2000)
  • SHIOKAWA Yoshiro ID: 9000021076307

    ANELVA Technix Corporation (2004 from CiNii)

    Articles in CiNii:1

    • Development of ion attachment mass spectrometry and its applications (2004)
  • SHIOKAWA Yoshiro ID: 9000021466446

    JRCAT-ATP (1995 from CiNii)

    Articles in CiNii:1

    • サマリー・アブストラクト (1995)
  • SHIOKAWA Yoshiro ID: 9000021531299

    Joint Research Center for Atom Technology (1999 from CiNii)

    Articles in CiNii:1

    • サマリー・アブストラクト (1999)
  • SHIOKAWA Yoshiro ID: 9000021581458

    JRCAT-ATP (1998 from CiNii)

    Articles in CiNii:1

    • サマリー・アブストラクト (1998)
  • SHIOKAWA Yoshiro ID: 9000021681775

    Canon ANELVA Technix Corporation (2007 from CiNii)

    Articles in CiNii:1

    • Development of Ion Attachment Mass Spectrometry and its Applications (2007)
  • SHIOKAWA Yoshiro ID: 9000253648479

    ANELVA Corp. (1994 from CiNii)

    Articles in CiNii:1

    • Development of a VAMAS Type Standard Channel Electron Multiplier for Quantitative Auger Electron Spectroscopy. (1994)
  • SHIOKAWA Yoshiro ID: 9000253650005

    ANELVA Corporation (1984 from CiNii)

    Articles in CiNii:1

    • The Fundamental and Techniques of AES Analysis (1984)
  • SHIOKAWA Yoshiro ID: 9000391841944

    ANELVA Corp., JAPAN (2003 from CiNii)

    Articles in CiNii:1

    • Investigation on Pyrolysis Behavior of Organic Sintering Aids for Porous Alumina Processing Using Ion Attachment Mass Spectrometry (IAMS). (2003)
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