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  • SONG Seung-Chul ID: 9000002174802

    SEMATECH (2007 from CiNii)

    Articles in CiNii:2

    • Compatibility of ALD Hafnium Silicate with Dual Metal Gate CMOS Integration (2006)
    • Effects of O_2 Plasma Treatment on the Reliabilities of Metal Gate/High-k Dielectric MOSFETs (2007)
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