Search Results1-20 of  215

  • Sugai Hideo ID: 9000025083992

    Articles in CiNii:1

    • Multi-hollow plasma production along dielectric plate in microwave discharge (2007)
  • SUGAI HIDEO ID: 9000392084925

    Graduate School of Engineering, Nagoya University (2006 from CiNii)

    Articles in CiNii:1

    • Temperature Dependence of the D-H Replacement Rates in D-implanted Oxide Ceramics Exposed to H2O Vapor (2006)
  • SUGAI HIDEO ID: 9000398971786

    Articles in CiNii:1

    • PB-32 ANALISIS OF AN ACOUSTIC STREAMING AND ITS APPLICATION FOR MIXING IN HIGH PRESSURE VESSEL (1994)
  • SUGAI Hideo ID: 9000000227923

    Department of Electrical Engineering, Faculty of Engineering, Nagoya University (1997 from CiNii)

    Articles in CiNii:1

    • Surface Wave Eigenmodes in a Finite-Area Plane Microwave Plasma (1997)
  • SUGAI Hideo ID: 9000001838839

    Department of Electrical Engineering, Nagoya University (2006 from CiNii)

    Articles in CiNii:1

    • Negative Ion Transfer Model of Low-Temperature Oxidation of Silicon Surface by High-Density Microwave Plasma (2006)
  • SUGAI Hideo ID: 9000001927264

    Nagoya University (2000 from CiNii)

    Articles in CiNii:1

    • New Method of Measuring Electron Density : Characteristics of Plasma Absorption Probe (2000)
  • SUGAI Hideo ID: 9000001927339

    Department of Electrical Engineering, Nagoya University (1997 from CiNii)

    Articles in CiNii:1

    • RECENT DEVELOPMENT OF HIGH-DENSITY PLASMA SOURCES FOR SEMICONDUCTOR PROCESSING (1997)
  • SUGAI Hideo ID: 9000001927579

    Department of Electrical Engineering, Nagoya University (1997 from CiNii)

    Articles in CiNii:1

    • INFLUENCE OF ION-INDUCED RADICAL DESORPTION FROM FLUOROCARBON DEPOSITS IN A HIGH DENSITY PLASMAS (1997)
  • SUGAI Hideo ID: 9000003271586

    Department of Electronic Engineering, Tohoku University (1971 from CiNii)

    Articles in CiNii:1

    • Low-Frequency Electrostatic Waves in a Weakly Ionized Plasma under a Weak Magnetic Field (1971)
  • SUGAI Hideo ID: 9000003276825

    Faculty of Engineering,Nagoya University (1981 from CiNii)

    Articles in CiNii:1

    • Nonlinear Collisionless Damping of Electron Cyclotron Waves (1981)
  • SUGAI Hideo ID: 9000003282008

    Department of Electronic Engineering, Tohoku University (1969 from CiNii)

    Articles in CiNii:1

    • External excitation of space charge waves in rf discharges (1969)
  • SUGAI Hideo ID: 9000005462228

    Articles in CiNii:9

    • Radial Density Profile of Microwave Plasma for Wall Conditioning in a Purely Toroidal Magnetic Field (2001)
    • 千変万化するプラズマの姿態 (1998)
    • Announcement of the 1997 Penning Prize Winner (1998)
  • SUGAI Hideo ID: 9000005560582

    Department o Electrical Engineering, Nagoya University (1994 from CiNii)

    Articles in CiNii:1

    • Free Radicals in an Inductively Coupled Etching Plasma (1994)
  • SUGAI Hideo ID: 9000005563468

    Department of Electrical Engineering, Faculty of Engineering, Nagoya University (1994 from CiNii)

    Articles in CiNii:1

    • High-Speed Etching of Indium-Tin-Oxide Thin Films Using an Inductively Coupled Plasma (<Special Issue> Plasma Processing) (1994)
  • SUGAI Hideo ID: 9000005596173

    Department of Electrical Engineering, School of Engineering, Nagoya University (1998 from CiNii)

    Articles in CiNii:1

    • Cross Sections for Electron-Impact Dissociation of Alternative Etching Gas, C_3HF_7O (1998)
  • SUGAI Hideo ID: 9000005623478

    Department of Electrical Engineering, Nagoya University (1994 from CiNii)

    Articles in CiNii:1

    • A New Approach to Boronization of Fusion Devices : (1994)
  • SUGAI Hideo ID: 9000005652422

    Department of Electrical Engineering, Nagoya University (1994 from CiNii)

    Articles in CiNii:1

    • Radical Control by Wall Heating of a Fluorocarbon Etching Reactor (1994)
  • SUGAI Hideo ID: 9000005658515

    Department of Electrical Engineering, School of Engineering, Nagoya University (1995 from CiNii)

    Articles in CiNii:1

    • New Inductive rf Discharge Using an Internal Metal Antenna (1995)
  • SUGAI Hideo ID: 9000005678002

    Department of Electrical Engineering, School of Engineering, Nagoya University (1997 from CiNii)

    Articles in CiNii:1

    • Absolute Fluorine Atom Densities in Fluorocarbon High-Density Plasmas Measured by Appearance Mass Spectrometry (1997)
  • SUGAI Hideo ID: 9000005891634

    Department of Electrical Engineering, Nagoya University (2000 from CiNii)

    Articles in CiNii:1

    • Two-Dimensional Modeling of Slot-Excited Surface Waves in Bounded Planar Plasmas (2000)
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