Search Results1-8 of  8

  • SUKEGAWA Takae ID: 9000005579110

    Micro Process Technology Development Department, Fujitsu Ltd. (1997 from CiNii)

    Articles in CiNii:1

    • Transmission Electron Microscopy Observation of CoSi_x Spikes in Si Substrates during Co-silicidation Process (1997)
  • SUKEGAWA Takae ID: 9000017482222

    Semiconductor Technology Academic Research Center (2010 from CiNii)

    Articles in CiNii:1

    • In-depth Profile Analysis in Metal/high-k Gate Stack Structures Studied by Synchrotron-radiation Photoelectron Spectroscopy (2010)
  • SUKEGAWA Takae ID: 9000107344085

    Process Development Department, Advanced LSI Development Division, FUJITSU Ltd. (2005 from CiNii)

    Articles in CiNii:1

    • Suppression of Gate Depletion in p^+-Polysilicon-Gated Sub-40nm pMOSFETs by Laser Thermal Processing (2005)
  • Sukegawa Takae ID: 9000258133414

    Micro Process Technology Development Department, Fujitsu Ltd., 4–1–1 Kamikodanaka, Nakahara–ku, Kawasaki 211–88, Japan (1997 from CiNii)

    Articles in CiNii:1

    • Transmission Electron Microscopy Observation of CoSix Spikes in Si Substrates during Co-silicidation Process. (1997)
  • Sukegawa Takae ID: 9000258180709

    Process Development Department, Advanced LSI Development Division, FUJITSU Ltd., Akiruno Technology Center (2005 from CiNii)

    Articles in CiNii:1

    • Suppression of Gate Depletion in p+-Polysilicon-Gated Sub-40nm pMOSFETs by Laser Thermal Processing (2005)
  • Sukegawa Takae ID: 9000258703684

    STARC (2009 from CiNii)

    Articles in CiNii:1

    • In-depth analysis of metal/high-k gate stack structures studied by synchrotron-radiation photoemission spectroscopy (2009)
  • Sukegawa Takae ID: 9000401666893

    Articles in CiNii:1

    • Transmission Electron Microscopy Observation ofCoSixSpikes in Si Substrates during Co-silicidation Process (1997)
  • Sukegawa Takae ID: 9000401735647

    Articles in CiNii:1

    • Suppression of Gate Depletion in p+-Polysilicon-Gated Sub-40 nm pMOSFETs by Laser Thermal Processing (2005)
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